METHOD OF FORMING AN ELECTRICALLY CONDUCTIVE FEATURE TRAVERSING A MICROSCOPIC STEP AND RELATED APPARATUS

    公开(公告)号:US20220310397A1

    公开(公告)日:2022-09-29

    申请号:US17654088

    申请日:2022-03-09

    Applicant: XTPL S.A.

    Abstract: A method of forming an electrically conductive feature traversing a microscopic step on or in a substrate is disclosed. A metallic nanoparticle composition is continuously extruded from a capillary tube (nozzle) while displacing the capillary tube along a first portion of a trajectory from a first position (above a step-top portion) past an edge of the microscopic step to a second position to form a first extrudate. The composition is continuously extruded while displacing the nozzle along a sloped second portion of the trajectory from the second position to a third position (above a step-bottom portion) to form a second extrudate. The third position is at a lower height than the second position. The composition is continuously extruded while displacing the nozzle along a third portion of the trajectory from the third position to a fourth position (above the step-bottom portion). The feature includes the first, second, and third extrudates.

Patent Agency Ranking