Invention Publication
- Patent Title: MEMBRANE CLEANING APPARATUS
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Application No.: US17768280Application Date: 2020-08-25
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Publication No.: US20240142871A1Publication Date: 2024-05-02
- Inventor: Andrey NIKIPELOV , Dmitry KURILOVICH
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Priority: EP 204036.8 2019.10.18
- International Application: PCT/EP2020/073669 2020.08.25
- Date entered country: 2022-04-12
- Main IPC: G03F1/82
- IPC: G03F1/82 ; G03F1/64
Abstract:
A membrane cleaning apparatus for removing particles from a membrane, the apparatus including: a membrane support for supporting the membrane; and a pressure pulse generating mechanism including one or more laser energy sources configured to generate a pressure pulse in a gas. The one or more energy laser sources may be focused to generate a pressure pulse in a gaseous atmosphere. The pressure pulse serves to dislodge particles on the membrane.
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