公开(公告)号：US20220008963A1

公开(公告)日：2022-01-13

申请号：US17294013

申请日：2019-11-22

Applicant: ASML NETHERLANDS B.V.

Inventor： Andrey NIKIPELOV ,  Dmitry KURILOVICH ,  Fabio SBRIZZAI ,  Marcus Adrianus VAN DE KERKHOF ,  Ties Wouter VAN DER WOORD ,  Willem Joan VAN DER ZANDE ,  Jeroen VAN DUIVENBODE ,  David Ferdinand VLES

IPC: B08B6/00 ,  B08B7/02 ,  B08B7/04 ,  G03F1/62 ,  G03F1/82

Abstract: A membrane cleaning apparatus for removing particles from a membrane, the apparatus including a membrane support and an electric field generating mechanism. The membrane support is for supporting the membrane. The electric field generating mechanism is for generating an electric field in the vicinity of the membrane when supported by the membrane support. The electric field generating mechanism may include: one or more collector electrodes; and a mechanism for applying a voltage across a membrane supported by the membrane support and the or each of the one or more collector electrodes.

公开(公告)号：US20240142871A1

公开(公告)日：2024-05-02

申请号：US17768280

申请日：2020-08-25

Applicant: ASML NETHERLANDS B.V.

Inventor： Andrey NIKIPELOV ,  Dmitry KURILOVICH

IPC: G03F1/82 ,  G03F1/64

CPC classification number: G03F1/82 ,  G03F1/64

Abstract: A membrane cleaning apparatus for removing particles from a membrane, the apparatus including: a membrane support for supporting the membrane; and a pressure pulse generating mechanism including one or more laser energy sources configured to generate a pressure pulse in a gas. The one or more energy laser sources may be focused to generate a pressure pulse in a gaseous atmosphere. The pressure pulse serves to dislodge particles on the membrane.

公开(公告)号：US20230311173A1

公开(公告)日：2023-10-05

申请号：US18206887

申请日：2023-06-07

Applicant: ASML NETHERLANDS B.V.

Inventor： Andrey NIKIPELOV ,  Dmitry KURILOVICH ,  Fabio SBRIZZAI ,  Marcus Adrianus VAN DE KERKHOF ,  Ties Wouter VAN DER WOORD ,  Willem Joan VAN DER ZANDE ,  Jeroen VAN DUIVENBODE ,  David Ferdinand VLES

IPC: B08B6/00 ,  B08B7/02 ,  B08B7/04 ,  G03F1/62 ,  G03F1/82

CPC classification number: B08B6/00 ,  B08B7/02 ,  B08B7/04 ,  G03F1/62 ,  G03F1/82

Abstract: A membrane cleaning apparatus for removing particles from a membrane, the apparatus including a membrane support and an electric field generating mechanism. The membrane support is for supporting the membrane. The electric field generating mechanism is for generating an electric field in the vicinity of the membrane when supported by the membrane support. The electric field generating mechanism may include: one or more collector electrodes; and a mechanism for applying a voltage across a membrane supported by the membrane support and the or each of the one or more collector electrodes.