Invention Publication
- Patent Title: METHOD OF FORMING AN ORGANIC POLYMER COMPRISING POLYIMIDE
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Application No.: US18519172Application Date: 2023-11-27
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Publication No.: US20240177992A1Publication Date: 2024-05-30
- Inventor: Andrea Illiberi , Shaoren Deng , Giuseppe Alessio Verni , Daria Nevstrueva , Marko Tuominen , Charles Dezelah , Daniele Chiappe , Eva Elisabeth Tois , Viraj Madhiwala , Michael Givens
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Main IPC: H01L21/02
- IPC: H01L21/02

Abstract:
The disclosure relates to methods of forming organic polymers comprising polyimide and layers comprising the same and to methods of reducing polyamic acid content of an organic polymer. The embodiments of the disclosure further relate to methods of fabricating semiconductor devices, to selectively depositing a material on a surface of a semiconductor substrate and to semiconductor processing assemblies. The methods are characterized by contacting a polyimide-containing material, such as a layer, with a modifying agent that increases the proportion of polyimide in the organic polymer material.
Information query
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