Invention Publication
- Patent Title: END EFFECTOR AND SUBSTRATE PROCESSING APPARATUS INCLUDING END EFFECTOR
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Application No.: US18543906Application Date: 2023-12-18
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Publication No.: US20240198538A1Publication Date: 2024-06-20
- Inventor: Taira Okabe
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Main IPC: B25J15/00
- IPC: B25J15/00 ; B06B1/06 ; B25J11/00
Abstract:
An End effector is disclosed. The exemplary end effector includes a substrate-supporting body for placing the substrate thereon; and a first array of wave generators disposed in the substrate-supporting body and configured to generate a surface wave to a backside of the substrate.
Information query
