Invention Publication
- Patent Title: POLISHING METHOD AND POLISHING APPARATUS
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Application No.: US18571054Application Date: 2022-06-14
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Publication No.: US20240278380A1Publication Date: 2024-08-22
- Inventor: Shinro OTA , Masahiro HATAKEYAMA
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP 21102959 2021.06.22 JP 22088291 2022.05.31
- International Application: PCT/JP2022/023734 2022.06.14
- Date entered country: 2023-12-15
- Main IPC: B24B37/013
- IPC: B24B37/013 ; B24B37/04 ; B24B37/10

Abstract:
The present invention relates to a polishing method and a polishing apparatus for polishing a substrate, such as a wafer. This method includes: polishing a substrate W; producing a torque waveform while polishing the substrate W; and selecting one reference torque waveform from a plurality of reference torque waveforms accumulated before the polishing of the substrate W. Polishing the substrate W includes an asperity polishing process and a flat polishing process. The asperity polishing process includes: determining film thicknesses at measurements point on the substrate W based on a film thickness of reference film data calculated based on a first relational expression; comparing the torque waveform and the selected reference torque waveform; and determining whether the asperity polishing process should be terminated. The flat polishing process includes determining film thicknesses at measurement points on the substrate W based on a film thickness of reference film data calculated based on a second relational expression.
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