Invention Grant
- Patent Title: Cyclic polyisoprene photoresist compositions
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Application No.: US3669669DApplication Date: 1970-10-28
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Publication No.: US3669669APublication Date: 1972-06-13
- Inventor: KLEIN DONALD L , MACINTYRE MICHAEL W , ROTHMAN LAWRENCE J
- Applicant: IBM
- Assignee: Ibm
- Current Assignee: Ibm
- Priority: US8483370 1970-10-28
- Main IPC: C08K5/28
- IPC: C08K5/28 ; G03F7/012 ; H01L21/312 ; G03C1/52
Abstract:
A CYCLIZED POLYISOPRENE/ARYL BIS-AZIDE SENSITIZED NEGATIVE PHOTORESIST FOR SEMICONDUCTOR DEVICE MANUFACTURE CONTAINING A MAXIMUM OF 1.3% SENSITIZER, AND CHARACTERIZED BY THE THREE PARAMETERS
(A) THE PERCENTAGE OF UNCYCLIZED ISOPRENE (FOR MONOMER) UNITS AS A FUNCTION OF SENSITIZER CONTENT, REPRESENTED BY THE SYMBOL R, WHERE R=PERCENT UNCYCLIZED POLYISOPRENE/PERCENT SENSITIZER. (B) THE RATIO OF INTERNAL TO TERMINAL DOUBLE BONDS IN A CYCLIZED MATERIAL AS A FUNCTION OF SENSITIZER REPRESENTED BY THE SYMBOL Q, WHERE Q=IR ABSORBANCE OF INTERNAL C=C/IR ABSORBANCE TERMINAL C=C-PERCENT SENSISITIZER, AND (C) A COMBINED SENSITIZER DEPENDENT FIGURE OF MERIT FUNCTION K WHERE K=QRS WITH THE FOLLOWING MAXIMUM LIMITS SET TO THE PARAMETERS:
QMAX=0.47, RMAX=13.0, AND KMAX=7.94
(A) THE PERCENTAGE OF UNCYCLIZED ISOPRENE (FOR MONOMER) UNITS AS A FUNCTION OF SENSITIZER CONTENT, REPRESENTED BY THE SYMBOL R, WHERE R=PERCENT UNCYCLIZED POLYISOPRENE/PERCENT SENSITIZER. (B) THE RATIO OF INTERNAL TO TERMINAL DOUBLE BONDS IN A CYCLIZED MATERIAL AS A FUNCTION OF SENSITIZER REPRESENTED BY THE SYMBOL Q, WHERE Q=IR ABSORBANCE OF INTERNAL C=C/IR ABSORBANCE TERMINAL C=C-PERCENT SENSISITIZER, AND (C) A COMBINED SENSITIZER DEPENDENT FIGURE OF MERIT FUNCTION K WHERE K=QRS WITH THE FOLLOWING MAXIMUM LIMITS SET TO THE PARAMETERS:
QMAX=0.47, RMAX=13.0, AND KMAX=7.94
Information query
