Invention Grant
- Patent Title: Method of determining local structures in optical crystals
- Patent Title (中): 确定光学晶体中局部结构的方法
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Application No.: US10464402Application Date: 2003-06-18
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Publication No.: US06989904B2Publication Date: 2006-01-24
- Inventor: Ewald Moersen , Axel Engel , Christian Lemke , Guenter Grabosch
- Applicant: Ewald Moersen , Axel Engel , Christian Lemke , Guenter Grabosch
- Applicant Address: DE Mainz
- Assignee: Schott AG
- Current Assignee: Schott AG
- Current Assignee Address: DE Mainz
- Agent Michael J. Striker
- Priority: DE10227345 20020619
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01N21/00 ; G01J4/00

Abstract:
The method for determining local structures in optical materials, especially crystals, includes observing schlieren visually in a material to be tested with divergent white light in a first step; measuring birefringence of polarized laser light in the material to determine local defects and structure faults in the material with a spatial resolution of 0.5 mm or better in a second step if the material is judged to be suitable in the first step and then interferometrically measuring the material to determine the faults in the material by interferometry in a third step if the material is judged to be suitable in the first and second steps. This method can be part of a method for making optical components, especially for microlithography.
Public/Granted literature
- US20040021803A1 Method of determining local structures in optical crystals Public/Granted day:2004-02-05
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