公开(公告)号：US06969502B2

公开(公告)日：2005-11-29

申请号：US10220115

申请日：2001-03-02

Applicant: Gunther Wehrhan ,  Peter Elzner ,  Ewald Moersen ,  Richard Schatter ,  Hans-Joerg Axmann ,  Thorsten Reichardt

Inventor： Gunther Wehrhan ,  Peter Elzner ,  Ewald Moersen ,  Richard Schatter ,  Hans-Joerg Axmann ,  Thorsten Reichardt

IPC: G03F7/20 ,  C30B11/00 ,  C30B29/12 ,  H01L21/027 ,  C01B9/00 ,  C30B13/16

CPC classification number: C30B11/003 ,  C30B11/00 ,  C30B29/12 ,  Y10S117/90 ,  Y10T117/10

Abstract: In the method for growing large-volume monocrystals crystal raw material is heated in a melting vessel with heating elements to a temperature above its melting point until a melt is formed. A monocrystal is then formed on the bottom of the melting vessel by lowering the temperature at least to the crystallization point. A solid/liquid phase boundary is formed between the monocrystal and the melt. The monocrystal grows towards the melt surface in a direction that is perpendicular to the phase boundary. A vertical axial temperature gradient is produced and maintained between the bottom of the melting vessel and its upper opening and heat inflow and/or heat outflow through side walls of the melting vessel is prevented, so that the solid/liquid phase boundary has a curvature radius of at least one meter. A crystal-growing device for performing this process is also described.

Abstract translation: 在生长大容量单晶的方法中，将晶体原料在具有加热元件的熔融容器中加热到高于其熔点的温度，直到形成熔体。 然后通过将温度至少降低至结晶点，在熔融容器的底部形成单晶。 在单晶和熔体之间形成固相/液相边界。 单晶在垂直于相边界的方向上朝着熔体表面生长。 在熔化槽的底部与其上部开口之间产生垂直的轴向温度梯度，并且防止了通过熔融容器的侧壁的热流入和/或热流出，使得固/液相边界具有曲率半径 至少一米。 还描述了用于执行该处理的晶体生长装置。

公开(公告)号：US06989904B2

公开(公告)日：2006-01-24

申请号：US10464402

申请日：2003-06-18

Applicant: Ewald Moersen ,  Axel Engel ,  Christian Lemke ,  Guenter Grabosch

Inventor： Ewald Moersen ,  Axel Engel ,  Christian Lemke ,  Guenter Grabosch

IPC: G01B9/02 ,  G01N21/00 ,  G01J4/00

CPC classification number: G03F7/70966 ,  G01N21/23 ,  G01N21/455 ,  G01N21/896 ,  G01N21/958

Abstract: The method for determining local structures in optical materials, especially crystals, includes observing schlieren visually in a material to be tested with divergent white light in a first step; measuring birefringence of polarized laser light in the material to determine local defects and structure faults in the material with a spatial resolution of 0.5 mm or better in a second step if the material is judged to be suitable in the first step and then interferometrically measuring the material to determine the faults in the material by interferometry in a third step if the material is judged to be suitable in the first and second steps. This method can be part of a method for making optical components, especially for microlithography.

Abstract translation: 用于确定光学材料，特别是晶体中的局部结构的方法包括在第一步骤中以发散的白光在待测材料中目视观察schlieren; 测量材料中的偏振激光的双折射，以确定在第二步中空间分辨率为0.5mm或更好的材料中的局部缺陷和结构断层，如果该材料被判断为适合于第一步骤然后干涉测量材料 如果在第一和第二步骤中判断材料是合适的，则通过第三步骤中的干涉测量来确定材料中的故障。 该方法可以是制造光学部件的方法的一部分，特别是用于微光刻。

公开(公告)号：US06891980B2

公开(公告)日：2005-05-10

申请号：US10090975

申请日：2002-03-05

Applicant: Michael Gerhard ,  Frank-Thomas Lentes ,  Christian Kusch ,  Wolfgang Singer ,  Ewald Moersen

Inventor： Michael Gerhard ,  Frank-Thomas Lentes ,  Christian Kusch ,  Wolfgang Singer ,  Ewald Moersen

IPC: G01M11/00 ,  G01N21/27 ,  G01N21/45 ,  G01N21/896 ,  G01N21/958 ,  G06T1/00 ,  G06T7/00 ,  G06K7/10

CPC classification number: G01N21/455 ,  G01N21/958

Abstract: The method for evaluating schlieren in glassy or crystalline optical materials includes irradiating a test sample of the optical material with light and producing a shadow image of the test sample on a projection screen. The shadow image of the test sample is received in an electronic image receiving device, such as a digital camera, and is compared with another shadow image of schlieren obtained with a comparison sample by means of interferometry. Then the optical material of the test sample is evaluated with the help of the comparison results.

Abstract translation: 用于评估玻璃态或结晶光学材料中的晶体的方法包括用光照射光学材料的测试样品并在投影屏上产生测试样品的阴影图像。 将测试样本的阴影图像接收在诸如数字照相机的电子图像接收装置中，并且通过干涉测量与用比较样品获得的schlieren的另一个阴影图像进行比较。 然后借助比较结果评估测试样品的光学材料。

公开(公告)号：US06603547B2

公开(公告)日：2003-08-05

申请号：US09975173

申请日：2001-10-11

Applicant: Ewald Moersen ,  Burkhard Speit ,  Lorenz Strenge ,  Joerg Kandler

Inventor： Ewald Moersen ,  Burkhard Speit ,  Lorenz Strenge ,  Joerg Kandler

IPC: G01J330

CPC classification number: G01N21/31

Abstract: The method for determining radiation stability of a crystal to radiation of a working wavelength to be employed in a subsequent application includes taking a first absorption spectrum (A) of a cleaved piece of the crystal with a given thickness (D) over a predetermined wavelength range from a first wavelength (&lgr;1) to a second wavelength (&lgr;2) by means of a spectrophotometer. Then the cleaved piece of the crystal is irradiated with an energetic radiation source so as to form all theoretically possible color centers (saturation). After the irradiating a second absorption spectrum (B) of the cleaved piece of crystal is taken over the same predetermined wavelength range. Then a surface integral of a difference spectrum of the first absorption spectrum and the second absorption spectrum over the predetermined wavelength range is formed and divided by the thickness (D) to obtain a scaled surface integral value. The absorption coefficient &Dgr;k at the working wavelength for the subsequent application is then obtained preferably from the scaled surface integral value for the damage induced by the energetic radiation and a calibration curve relating the absorption coefficient at the working wavelength to the surface integral of the absorption coefficient induced by the energetic radiation.

公开(公告)号：US06816326B2

公开(公告)日：2004-11-09

申请号：US10194700

申请日：2002-07-12

Applicant: Kurt Nattermann ,  Ewald Moersen

Inventor： Kurt Nattermann ,  Ewald Moersen

IPC: G02B700

CPC classification number: G03F7/70958 ,  G02B1/02 ,  G02B13/143

Abstract: The optical system has a first optical element (11,17, 19, 26) and a second optical element (12, 18, 20, 27) having respective plane surfaces and cubic crystal structures, which are arranged next to each other along an optic axis (10) so that one of the crystal axes of each optical element is parallel to the optic axis and the plane surfaces are resting against each other. The first and second optical elements have first and second orientations in relation to the optic axis, which are preferably rotated by a rotation about the optic axis (10) with respect to each other according to the rotational symmetry of the material. At least one of the first optical element and second optical element is pre-stressed by applying a compressive stress (&sgr;,&sgr;,1,&sgr;2) thereto. The compressive stress is applied radially symmetrically in a plane perpendicular to the optic axis (10) and compensates for spatial dispersion.

公开(公告)号：US06740159B2

公开(公告)日：2004-05-25

申请号：US10230232

申请日：2002-08-28

Applicant: Joerg Kandler ,  Ewald Moersen ,  Burkhard Speit ,  Harry Bauer ,  Thure Boehm ,  Eric Eva ,  Michael Thier ,  Hexin Wang ,  Frank Richter ,  Hans-Josef Paus

Inventor： Joerg Kandler ,  Ewald Moersen ,  Burkhard Speit ,  Harry Bauer ,  Thure Boehm ,  Eric Eva ,  Michael Thier ,  Hexin Wang ,  Frank Richter ,  Hans-Josef Paus

IPC: C30B15804

CPC classification number: G02B1/02 ,  C30B11/00 ,  C30B29/12

Abstract: A method of making a fracture-resistant large-size calcium fluoride single crystal is described, which is suitable for an optical component for radiation in the far UV range. The calcium fluoride raw material for the single crystal is first melted and subsequently solidified by cooling the melt to form a single crystal. However the calcium fluoride raw material is doped with from 1 to 250, preferably 1 to 100, ppm of strontium, preferably added as strontium fluoride, and contains from 1 to 10 ppm of sodium as well as up to 100 ppm of other impurities.

Abstract translation: 描述了制造耐断裂大尺寸氟化钙单晶的方法，其适用于在远紫外范围内用于辐射的光学部件。 首先将用于单晶的氟化钙原料熔化并随后通过冷却熔体而固化形成单晶。 然而，氟化钙原料掺杂有1至250，优选1至100ppm的锶，优选以氟化锶加入，并且含有1至10ppm的钠以及至多100ppm的其它杂质。