Invention Grant
US07466408B2 Measurement system 失效
测量系统

Measurement system
Abstract:
A measurement system that optically measures in turn a plurality of samples arranged in an array via an objective lens and an imaging lens is disclosed, which is characterized by comprising an actuator means that moves the above described objective lens corresponding to each position of the above mentioned samples, and a photo-detecting part that detects a sample image via the above objective lens and imaging lens.
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