Invention Grant
- Patent Title: Measurement system
- Patent Title (中): 测量系统
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Application No.: US10287658Application Date: 2002-11-05
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Publication No.: US07466408B2Publication Date: 2008-12-16
- Inventor: Takeo Tanaami
- Applicant: Takeo Tanaami
- Applicant Address: JP Tokyo
- Assignee: Yokogawa Electric Corporation
- Current Assignee: Yokogawa Electric Corporation
- Current Assignee Address: JP Tokyo
- Agency: Westerman, Hattori, Daniels & Adrian, LLP.
- Priority: JP2001-355843 20011121
- Main IPC: G01J3/30
- IPC: G01J3/30 ; G01J1/58 ; G01N21/85 ; F21V9/16 ; G01T1/10 ; G21H3/02 ; G21K5/00 ; H01J65/06 ; H01J65/08 ; H01J3/14 ; H01J5/16 ; H01J40/14

Abstract:
A measurement system that optically measures in turn a plurality of samples arranged in an array via an objective lens and an imaging lens is disclosed, which is characterized by comprising an actuator means that moves the above described objective lens corresponding to each position of the above mentioned samples, and a photo-detecting part that detects a sample image via the above objective lens and imaging lens.
Public/Granted literature
- US20030095254A1 Measurement system Public/Granted day:2003-05-22
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