Invention Grant
- Patent Title: Titanium oxide photocatalyst thin film and production method of titanium oxide photocatalyst thin film
- Patent Title (中): 氧化钛光催化薄膜及氧化钛光催化薄膜的制备方法
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Application No.: US11125260Application Date: 2005-05-10
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Publication No.: US07695774B2Publication Date: 2010-04-13
- Inventor: Shigemi Ohtsu , Tatsuya Maruyama , Eiichi Akutsu , Kazuhito Hashimoto
- Applicant: Shigemi Ohtsu , Tatsuya Maruyama , Eiichi Akutsu , Kazuhito Hashimoto
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: Fuji Xerox Co., Ltd.,Toudai TLO, Ltd.
- Current Assignee: Fuji Xerox Co., Ltd.,Toudai TLO, Ltd.
- Current Assignee Address: JP Tokyo JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2002-23175 20020131
- Main IPC: B05D3/06
- IPC: B05D3/06 ; B05D3/02 ; B05D5/06 ; C23C16/48 ; C23C16/56 ; C23C14/08 ; C23C14/28 ; C23C14/58
Abstract:
The present invention provides a titanium oxide photocatalytic thin film having a surface layer containing silicon oxide and titanium oxide and a production method for producing a titanium oxide photocatalytic thin film having a surface layer containing silicon oxide and titanium oxide and comprising a step of radiating excimer beam to the titanium oxide thin film while heating substrate on which the titanium oxide thin film is disposed in vacuum or gas atmosphere in the presence of a silicon-including compound.
Public/Granted literature
- US20050197248A1 Titanium oxide photocatalyst thin film and production method of titanium oxide photocatalyst thin film Public/Granted day:2005-09-08
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