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US07799374B2 Method for manufacturing field emission cathode 有权
场致发射阴极的制造方法

Method for manufacturing field emission cathode
Abstract:
A method for manufacturing a carbon nanotube field emission cathode includes the steps of: providing a substrate (110) with a metallic layer (130) thereon; defining holes (131) in the metallic layer; oxidizing the metallic layer to form a metallic oxide layer (132) thereon; removing portions of the metallic oxide layer in the holes so as to expose corresponding portions of the metallic layer; forming a metal-salt catalyst layer (580) on the exposed portions of the metallic layer in the holes; and growing carbon nanotubes (690) on the substrate in the holes.
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