Invention Grant
- Patent Title: Replaceable probe apparatus for probing semiconductor wafer
- Patent Title (中): 用于探测半导体晶片的可更换探针装置
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Application No.: US12762413Application Date: 2010-04-19
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Publication No.: US07999564B2Publication Date: 2011-08-16
- Inventor: Bryan J. Root , William A. Funk
- Applicant: Bryan J. Root , William A. Funk
- Applicant Address: US MN Apple Valley
- Assignee: Celadon Systems, Inc.
- Current Assignee: Celadon Systems, Inc.
- Current Assignee Address: US MN Apple Valley
- Agency: Hamre, Schumann, Mueller & Larson, P.C.
- Main IPC: G01R31/02
- IPC: G01R31/02 ; G01R31/26

Abstract:
A probe apparatus is provided with a plurality of probe tiles, an interchangeable plate for receiving the probe tiles, a floating plate being disposed between the respective probe tile and a receiving hole on the interchangeable plate, and a control mechanism providing multi-dimensional freedom of motions to control a position of the probe tile relative to the respective receiving hole of the interchangeable plate. A method of controlling the floating plate is also provided by inserting a pair of joysticks into two respective adjustment holes disposed on the floating plate and moving the pair of joysticks to provide translational motions (X-Y) and rotational (theta) motion of the floating plate, and turning the pair of jack screws clockwise and counter-clockwise to provide a translational motion (Z) and two rotational (pitch and roll) motions of the floating plate.
Public/Granted literature
- US20100203758A1 REPLACEABLE PROBE APPARATUS FOR PROBING SEMICONDUCTOR WAFER Public/Granted day:2010-08-12
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