公开(公告)号：US08698515B2

公开(公告)日：2014-04-15

申请号：US13210750

申请日：2011-08-16

Applicant: Bryan J. Root ,  William A. Funk

Inventor： Bryan J. Root ,  William A. Funk

IPC: G01R31/00

CPC classification number: G01R1/07307 ,  G01R31/2887 ,  G01R31/2889

Abstract: A test apparatus is described that can be useful as test equipment in various applications, including for example testing a semiconductor device. The test apparatus has a circuit board, a probe card, and a card holder. The circuit board includes a contact layout that electrically connects with a probe card at one portion and electrically connects with a probe card holder at another portion. The probe card has probes for electrically contacting a device to be tested, and has a contact configuration that electrically connects with the circuit board. The apparatus allows for electrical signals to be sent to and from the probe card, through the probe card holder and circuit board, in testing a device such as for example a semiconductor device. The circuit board and probe card holder have an attachment structure, configured for example as a notch and catch finger attachment arrangement.

Abstract translation: 描述了一种测试装置，其可用作各种应用中的测试设备，包括例如测试半导体器件。 测试装置具有电路板，探针卡和卡夹。 电路板包括一个接触布局，其一部分与探针卡电连接并且在另一部分与探针卡夹持器电连接。 探针卡具有用于电接触待测试装置的探针，并具有与电路板电连接的接触构造。 该装置允许在测试诸如半导体器件的器件时通过探针卡夹持器和电路板将电信号发送到探针卡和从探针卡发送。 电路板和探针卡保持器具有附接结构，例如配置为凹口和卡爪指状物附接装置。

公开(公告)号：US20120038380A1

公开(公告)日：2012-02-16

申请号：US13210750

申请日：2011-08-16

Applicant: Bryan J. Root ,  William A. Funk

Inventor： Bryan J. Root ,  William A. Funk

IPC: G01R31/20

CPC classification number: G01R1/07307 ,  G01R31/2887 ,  G01R31/2889

Abstract: A test apparatus is described that can be useful as test equipment in various applications, including for example testing a semiconductor device. The test apparatus has a circuit board, a probe card, and a card holder. The circuit board includes a contact layout that electrically connects with a probe card at one portion and electrically connects with a probe card holder at another portion. The probe card has probes for electrically contacting a device to be tested, and has a contact configuration that electrically connects with the circuit board. The apparatus allows for electrical signals to be sent to and from the probe card, through the probe card holder and circuit board, in testing a device such as for example a semiconductor device. The circuit board and probe card holder have an attachment structure, configured for example as a notch and catch finger attachment arrangement.

Abstract translation: 描述了一种测试装置，其可用作各种应用中的测试设备，包括例如测试半导体器件。 测试装置具有电路板，探针卡和卡夹。 电路板包括一个接触布局，其一部分与探针卡电连接并且在另一部分与探针卡夹持器电连接。 探针卡具有用于电接触待测试装置的探针，并具有与电路板电连接的接触构造。 该装置允许在测试诸如半导体器件的器件时通过探针卡夹持器和电路板将电信号发送到探针卡和从探针卡发送。 电路板和探针卡保持器具有附接结构，例如配置为凹口和卡爪指状物附接装置。

公开(公告)号：US20100203758A1

公开(公告)日：2010-08-12

申请号：US12762413

申请日：2010-04-19

Applicant: Bryan J. Root ,  William A. Funk

Inventor： Bryan J. Root ,  William A. Funk

IPC: H01R13/73

CPC classification number: G01R1/0491 ,  G01R1/07364

Abstract: A probe apparatus is provided with a plurality of probe tiles, an interchangeable plate for receiving the probe tiles, a floating plate being disposed between the respective probe tile and a receiving hole on the interchangeable plate, and a control mechanism providing multi-dimensional freedom of motions to control a position of the probe tile relative to the respective receiving hole of the interchangeable plate. A method of controlling the floating plate is also provided by inserting a pair of joysticks into two respective adjustment holes disposed on the floating plate and moving the pair of joysticks to provide translational motions (X-Y) and rotational (theta) motion of the floating plate, and turning the pair of jack screws clockwise and counter-clockwise to provide a translational motion (Z) and two rotational (pitch and roll) motions of the floating plate.

Abstract translation: 探针装置设置有多个探针瓦片，用于接收探针瓦片的可互换板，设置在相应探针瓦片和可互换板材上的接收孔之间的浮动板，以及提供多维自由度的控制机构 用于控制探针瓦片相对于可互换板的相应容纳孔的位置的运动。 通过将一对操纵杆插入设置在浮动板上的两个相应的调节孔并移动该对操纵杆以提供浮动板的平移运动（XY）和旋转（theta）运动，也提供了一种控制浮动板的方法， 并顺时针和逆时针转动一对千斤顶螺丝，以提供浮动板的平移运动（Z）和两个旋转（俯仰和滚动）运动。

公开(公告)号：US07545157B2

公开(公告)日：2009-06-09

申请号：US11779669

申请日：2007-07-18

Applicant: Bryan J. Root ,  William A. Funk

Inventor： Bryan J. Root ,  William A. Funk

IPC: G01R31/02

CPC classification number: G01R1/067 ,  G01R1/06711 ,  G01R1/18

Abstract: A shielded probe apparatus is provided with a shielded probe and a tri-axial cable that are electrically connected within a shielded chassis. The shielded probe apparatus is capable of electrically testing a semiconductor device at a sub 100 fA operating current and an operating temperature up to 300 C.

Abstract translation: 屏蔽探针装置设置有屏蔽探针和三线电缆，其在屏蔽的机壳内电连接。 屏蔽探针装置能够以低于100fA的工作电流和高达300℃的工作温度对半导体器件进行电测试。

公开(公告)号：US06963207B2

公开(公告)日：2005-11-08

申请号：US10383079

申请日：2003-03-06

Applicant: Bryan J. Root ,  William A. Funk

Inventor： Bryan J. Root ,  William A. Funk

IPC: G01R1/073 ,  G01R31/02

CPC classification number: G01R1/07342 ,  G01R1/06772 ,  G01R1/44

Abstract: A method and apparatus for terminating a probe that probes a semiconductor device with a signal cable from a tester is provided to connect layers of the probe to layers of the signal cable side by side. The probe and signal cable can be a co-axial or tri-axial probe and signal cable, respectively. A center conductive probe needle of the probe is disposed side by side with and electrically connects to a center signal conductor of the signal cable. A dielectric layer of the probe is disposed side by side with and connects to a dielectric layer of the signal cable. A conductive guard layer of the probe is disposed side by side with and electrically connects to a conductive dispersion/guard layer of the signal cable, and a sleeve of the probe is disposed side by side with and connects to a sleeve of the signal cable. In a tri-axial embodiment, a second dielectric layer of the probe is disposed side by side with and connects to a second dielectric layer of the signal cable.

公开(公告)号：US20120161804A1

公开(公告)日：2012-06-28

申请号：US13409488

申请日：2012-03-01

Applicant: Bryan J. Root ,  William A. Funk

Inventor： Bryan J. Root ,  William A. Funk

IPC: G01R31/20

CPC classification number: G01R1/0416 ,  G01R1/04 ,  G01R1/067 ,  G01R31/26 ,  G01R31/2601 ,  G01R31/2831

Abstract: A probe apparatus and method of terminating a probe that probes a semiconductor device with a signal cable from a tester side by side at a proximal end of the probe and a distal end of the signal cable. In one embodiment, the probe apparatus includes: a chassis; a dielectric block mounted in the chassis for retaining the probe, the probe extending on the chassis from a proximal end of the probe to the dielectric block, extending through the dielectric block, and projecting from the dielectric block towards the semiconductor device at a distal end of the probe; and a terminating apparatus, mounted in the chassis, for terminating the proximal end of the probe with a distal end of the signal cable side by side.

Abstract translation: 一种探针装置和方法，用于在探头的近端和信号电缆的远端处端接一个探测器，用探测器将信号电缆从测试仪并排测量。 在一个实施例中，探针装置包括：底盘; 安装在底盘中的用于保持探针的介质块，探针从探针的近端延伸到介质块的底架上延伸穿过介质块，并且在远端从介质块朝向半导体器件突出 的探针; 以及安装在底盘中的端接装置，用于以信号电缆的远端并排端接探头的近端。

公开(公告)号：US07999564B2

公开(公告)日：2011-08-16

申请号：US12762413

申请日：2010-04-19

Applicant: Bryan J. Root ,  William A. Funk

Inventor： Bryan J. Root ,  William A. Funk

IPC: G01R31/02 ,  G01R31/26

CPC classification number: G01R1/0491 ,  G01R1/07364

Abstract: A probe apparatus is provided with a plurality of probe tiles, an interchangeable plate for receiving the probe tiles, a floating plate being disposed between the respective probe tile and a receiving hole on the interchangeable plate, and a control mechanism providing multi-dimensional freedom of motions to control a position of the probe tile relative to the respective receiving hole of the interchangeable plate. A method of controlling the floating plate is also provided by inserting a pair of joysticks into two respective adjustment holes disposed on the floating plate and moving the pair of joysticks to provide translational motions (X-Y) and rotational (theta) motion of the floating plate, and turning the pair of jack screws clockwise and counter-clockwise to provide a translational motion (Z) and two rotational (pitch and roll) motions of the floating plate.

Abstract translation: 探针装置设置有多个探针瓦片，用于接收探针瓦片的可互换板，设置在相应探针瓦片和可互换板材上的接收孔之间的浮动板，以及提供多维自由度的控制机构 用于控制探针瓦片相对于可互换板的相应容纳孔的位置的运动。 通过将一对操纵杆插入设置在浮动板上的两个相应的调节孔中并移动该对操纵杆以提供浮动板的平移运动（XY）和旋转（theta）运动，也提供了一种控制浮动板的方法， 并顺时针和逆时针转动一对千斤顶螺丝，以提供浮动板的平移运动（Z）和两个旋转（俯仰和滚动）运动。

公开(公告)号：USD639757S1

公开(公告)日：2011-06-14

申请号：US29367935

申请日：2010-08-16

Applicant: Bryan J. Root ,  William A. Funk

Designer： Bryan J. Root ,  William A. Funk

公开(公告)号：US07768282B2

公开(公告)日：2010-08-03

申请号：US12372049

申请日：2009-02-17

Applicant: Bryan J. Root ,  William A. Funk

Inventor： Bryan J. Root ,  William A. Funk

IPC: G01R31/02

CPC classification number: G01R1/0416 ,  G01R1/04 ,  G01R1/067 ,  G01R31/26 ,  G01R31/2601 ,  G01R31/2831

Abstract: A probe apparatus and method of terminating a probe that probes a semiconductor device with a signal cable from a tester side by side at a proximal end of the probe and a distal end of the signal cable. In one embodiment, the probe apparatus includes: a chassis; a dielectric block mounted in the chassis for retaining the probe, the probe extending on the chassis from a proximal end of the probe to the dielectric block, extending through the dielectric block, and projecting from the dielectric block towards the semiconductor device at a distal end of the probe; and a terminating apparatus, mounted in the chassis, for terminating the proximal end of the probe with a distal end of the signal cable side by side.

Abstract translation: 一种探针装置和方法，用于在探头的近端和信号电缆的远端处端接一个探测器，用探测器将信号电缆从测试仪并排测量。 在一个实施例中，探针装置包括：底盘; 安装在底盘中的用于保持探针的介质块，探针从探针的近端延伸到介质块的底架上延伸穿过介质块，并且在远端从介质块朝向半导体器件突出 的探针; 以及安装在底盘中的端接装置，用于以信号电缆的远端并排端接探头的近端。

公开(公告)号：US07659737B1

公开(公告)日：2010-02-09

申请号：US11836507

申请日：2007-08-09

Applicant: Bryan J. Root ,  William A. Funk

Inventor： Bryan J. Root ,  William A. Funk

IPC: G01R31/02

CPC classification number: G01R1/18 ,  G01R1/0675 ,  G01R1/06772

Abstract: A probe needle apparatus and method provides a drive guard having the same potential as a probe needle for reducing signal noise in low current measurements. The probe needle apparatus includes a central conductive core covered with alternating layers of dielectric and conductive materials, a first layer of dielectric material applied to maintain electrical access to the conductive central core while providing continuous isolation of the conductive central core elsewhere, and a conductive drive guard layer applied around the first layer of dielectric material in electrical isolation from the conductive central core.

Abstract translation: 探针针装置和方法提供具有与探针相同的电位的驱动保护装置，用于在低电流测量中降低信号噪声。 探针针装置包括被电介质和导电材料的交替层覆盖的中心导电芯，施加第一介电材料层以保持对导电中心芯的电通路，同时在其它地方提供导电中心芯的连续隔离，以及导电驱动 保护层与导电中心芯电隔离地施加在第一绝缘材料层周围。