公开(公告)号：US20120161804A1

公开(公告)日：2012-06-28

申请号：US13409488

申请日：2012-03-01

Applicant: Bryan J. Root ,  William A. Funk

Inventor： Bryan J. Root ,  William A. Funk

IPC: G01R31/20

CPC classification number: G01R1/0416 ,  G01R1/04 ,  G01R1/067 ,  G01R31/26 ,  G01R31/2601 ,  G01R31/2831

Abstract: A probe apparatus and method of terminating a probe that probes a semiconductor device with a signal cable from a tester side by side at a proximal end of the probe and a distal end of the signal cable. In one embodiment, the probe apparatus includes: a chassis; a dielectric block mounted in the chassis for retaining the probe, the probe extending on the chassis from a proximal end of the probe to the dielectric block, extending through the dielectric block, and projecting from the dielectric block towards the semiconductor device at a distal end of the probe; and a terminating apparatus, mounted in the chassis, for terminating the proximal end of the probe with a distal end of the signal cable side by side.

Abstract translation: 一种探针装置和方法，用于在探头的近端和信号电缆的远端处端接一个探测器，用探测器将信号电缆从测试仪并排测量。 在一个实施例中，探针装置包括：底盘; 安装在底盘中的用于保持探针的介质块，探针从探针的近端延伸到介质块的底架上延伸穿过介质块，并且在远端从介质块朝向半导体器件突出 的探针; 以及安装在底盘中的端接装置，用于以信号电缆的远端并排端接探头的近端。

公开(公告)号：US07999564B2

公开(公告)日：2011-08-16

申请号：US12762413

申请日：2010-04-19

Applicant: Bryan J. Root ,  William A. Funk

Inventor： Bryan J. Root ,  William A. Funk

IPC: G01R31/02 ,  G01R31/26

CPC classification number: G01R1/0491 ,  G01R1/07364

Abstract: A probe apparatus is provided with a plurality of probe tiles, an interchangeable plate for receiving the probe tiles, a floating plate being disposed between the respective probe tile and a receiving hole on the interchangeable plate, and a control mechanism providing multi-dimensional freedom of motions to control a position of the probe tile relative to the respective receiving hole of the interchangeable plate. A method of controlling the floating plate is also provided by inserting a pair of joysticks into two respective adjustment holes disposed on the floating plate and moving the pair of joysticks to provide translational motions (X-Y) and rotational (theta) motion of the floating plate, and turning the pair of jack screws clockwise and counter-clockwise to provide a translational motion (Z) and two rotational (pitch and roll) motions of the floating plate.

Abstract translation: 探针装置设置有多个探针瓦片，用于接收探针瓦片的可互换板，设置在相应探针瓦片和可互换板材上的接收孔之间的浮动板，以及提供多维自由度的控制机构 用于控制探针瓦片相对于可互换板的相应容纳孔的位置的运动。 通过将一对操纵杆插入设置在浮动板上的两个相应的调节孔中并移动该对操纵杆以提供浮动板的平移运动（XY）和旋转（theta）运动，也提供了一种控制浮动板的方法， 并顺时针和逆时针转动一对千斤顶螺丝，以提供浮动板的平移运动（Z）和两个旋转（俯仰和滚动）运动。

公开(公告)号：USD639757S1

公开(公告)日：2011-06-14

申请号：US29367935

申请日：2010-08-16

Applicant: Bryan J. Root ,  William A. Funk

Designer： Bryan J. Root ,  William A. Funk

公开(公告)号：US07768282B2

公开(公告)日：2010-08-03

申请号：US12372049

申请日：2009-02-17

Applicant: Bryan J. Root ,  William A. Funk

Inventor： Bryan J. Root ,  William A. Funk

IPC: G01R31/02

CPC classification number: G01R1/0416 ,  G01R1/04 ,  G01R1/067 ,  G01R31/26 ,  G01R31/2601 ,  G01R31/2831

Abstract: A probe apparatus and method of terminating a probe that probes a semiconductor device with a signal cable from a tester side by side at a proximal end of the probe and a distal end of the signal cable. In one embodiment, the probe apparatus includes: a chassis; a dielectric block mounted in the chassis for retaining the probe, the probe extending on the chassis from a proximal end of the probe to the dielectric block, extending through the dielectric block, and projecting from the dielectric block towards the semiconductor device at a distal end of the probe; and a terminating apparatus, mounted in the chassis, for terminating the proximal end of the probe with a distal end of the signal cable side by side.

Abstract translation: 一种探针装置和方法，用于在探头的近端和信号电缆的远端处端接一个探测器，用探测器将信号电缆从测试仪并排测量。 在一个实施例中，探针装置包括：底盘; 安装在底盘中的用于保持探针的介质块，探针从探针的近端延伸到介质块的底架上延伸穿过介质块，并且在远端从介质块朝向半导体器件突出 的探针; 以及安装在底盘中的端接装置，用于以信号电缆的远端并排端接探头的近端。

公开(公告)号：US07659737B1

公开(公告)日：2010-02-09

申请号：US11836507

申请日：2007-08-09

Applicant: Bryan J. Root ,  William A. Funk

Inventor： Bryan J. Root ,  William A. Funk

IPC: G01R31/02

CPC classification number: G01R1/18 ,  G01R1/0675 ,  G01R1/06772

Abstract: A probe needle apparatus and method provides a drive guard having the same potential as a probe needle for reducing signal noise in low current measurements. The probe needle apparatus includes a central conductive core covered with alternating layers of dielectric and conductive materials, a first layer of dielectric material applied to maintain electrical access to the conductive central core while providing continuous isolation of the conductive central core elsewhere, and a conductive drive guard layer applied around the first layer of dielectric material in electrical isolation from the conductive central core.

Abstract translation: 探针针装置和方法提供具有与探针相同的电位的驱动保护装置，用于在低电流测量中降低信号噪声。 探针针装置包括被电介质和导电材料的交替层覆盖的中心导电芯，施加第一介电材料层以保持对导电中心芯的电通路，同时在其它地方提供导电中心芯的连续隔离，以及导电驱动 保护层与导电中心芯电隔离地施加在第一绝缘材料层周围。

公开(公告)号：US07170305B2

公开(公告)日：2007-01-30

申请号：US11266144

申请日：2005-11-03

Applicant: Bryan J. Root ,  William A. Funk

Inventor： Bryan J. Root ,  William A. Funk

IPC: G01R31/02

CPC classification number: G01R1/0416 ,  G01R1/04 ,  G01R1/067 ,  G01R31/26 ,  G01R31/2601 ,  G01R31/2831

Abstract: A probe apparatus and method of terminating a probe that probes a semiconductor device with a signal cable from a tester side by side at a proximal end of the probe and a distal end of the signal cable. In one embodiment, the probe apparatus includes: a chassis; a dielectric block mounted in the chassis for retaining the probe, the probe extending on the chassis from a proximal end of the probe to the dielectric block, extending through the dielectric block, and projecting from the dielectric block towards the semiconductor device at a distal end of the probe; and a terminating apparatus, mounted in the chassis, for terminating the proximal end of the probe with a distal end of the signal cable side by side.

Abstract translation: 一种探针装置和方法，用于在探头的近端和信号电缆的远端处端接一个探测器，用探测器将信号电缆从测试仪并排测量。 在一个实施例中，探针装置包括：底盘; 安装在底盘中的用于保持探针的介质块，探针从探针的近端延伸到介质块的底架上延伸穿过介质块，并且在远端从介质块朝向半导体器件突出 的探针; 以及安装在底盘中的端接装置，用于以信号电缆的远端并排端接探头的近端。

公开(公告)号：US06975128B1

公开(公告)日：2005-12-13

申请号：US10809051

申请日：2004-03-25

Applicant: Bryan J. Root ,  William A. Funk

Inventor： Bryan J. Root ,  William A. Funk

IPC: G01R1/067 ,  G01R1/18 ,  G01R31/02

CPC classification number: G01R1/18 ,  G01R1/0675 ,  G01R1/06772

Abstract: A probe needle apparatus having a conductive central core with alternating layers of dielectric and conductive materials is provided. The apparatus includes the conductive central core, a first layer of dielectric material applied to maintain electrical access to the conductive central core while providing continuous isolation of the conductive central core elsewhere, and a conductive driven guard layer applied around the first layer of dielectric material in electrical isolation from the conductive central core. The conductive driven guard layer is applied on the first layer of dielectric material with a mask on an end of the conductive central core to prevent the conductive driven guard layer from touching the conductive central core.

Abstract translation: 提供一种具有导电中心芯的探针针装置，其具有介电和导电材料的交替层。 该装置包括导电中心芯，第一层电介质材料，用于保持对导电中心芯的电通路，同时提供其他地方的导电中心芯的连续隔离，以及围绕第一介电材料层施加的导电驱动保护层 与导电中心芯电隔离。 导电驱动的保护层在导电中心芯的一端上用掩模施加在第一介电材料层上，以防止导电驱动的保护层接触导电中心芯。

公开(公告)号：US20140239996A1

公开(公告)日：2014-08-28

申请号：US14131058

申请日：2012-07-06

Applicant: Bryan J. Root ,  William A. Funk ,  Michael Palumbo ,  John L. Dunklee

Inventor： Bryan J. Root ,  William A. Funk ,  Michael Palumbo ,  John L. Dunklee

IPC: G01R1/073 ,  G01R31/26

CPC classification number: G01R1/07307 ,  G01R1/07364 ,  G01R31/2601 ,  G01R31/2889

Abstract: A test apparatus for testing a semiconductor device includes a circuit board having a contact pattern on one side and an opening therethrough, and a probe card supporting a probe needle array. The probe needle array is insertable into the opening of the circuit board and is configured to probe a device under test. The probe needle array is in electrical contact with the contact pattern of the circuit board, to allow signals through the probe card and circuit board to a test equipment. A holder supports the probe card and other probe cards. The holder has multiple sides, each of which is supportable of a probe card having a probe needle array. The holder is rotatable to manipulate and position the probe needle arrays of the probe cards relative to a device under test. The holder allows disconnection and replacement of the probe needle arrays from the holder.

Abstract translation: 用于测试半导体器件的测试装置包括：一侧具有接触图案的电路板和穿过其的开口;以及支撑探针针阵列的探针卡。 探针针阵列可插入电路板的开口中，并配置成探测被测器件。 探针针阵列与电路板的接触图形电接触，以允许通过探针卡和电路板的信号到测试设备。 支架支持探针卡和其他探针卡。 保持器具有多个侧面，每个侧面可支撑具有探针针阵列的探针卡。 保持器可旋转以相对于被测设备操纵和定位探针卡的探针针阵列。 支架允许从保持器断开和更换探针针阵列。

公开(公告)号：US08674715B2

公开(公告)日：2014-03-18

申请号：US13010234

申请日：2011-01-20

Applicant: Bryan J. Root ,  William A. Funk

Inventor： Bryan J. Root ,  William A. Funk

IPC: G01R31/20

CPC classification number: G01R31/2889 ,  G01R1/07378 ,  G01R3/00 ,  G01R31/2886 ,  H05K1/117 ,  H05K3/325 ,  H05K2201/09027 ,  H05K2201/09063 ,  H05K2201/09227 ,  H05K2203/167 ,  Y10T29/49126 ,  Y10T29/49128

Abstract: A probe core includes a frame, a wire guide connected to the frame, a probe tile, and a plurality of probe wires supported by the wire guide and probe tile. Each probe wire includes an end configured to probe a device, such as a semiconductor wafer. Each probe wire includes a signal transmitting portion and a guard portion. The probe core further includes a lock mechanism supported by the frame. The lock mechanism is configured to allow the probe core to be connected and disconnected to another test equipment or component, such as a circuit board. As one example, the probe core is configured to connect and disconnect from the test equipment or component in a rotatable lock and unlock operation or twist lock/unlock operation, where the frame is rotated relative to remainder of the core to lock/unlock the probe core.

Abstract translation: 探针芯包括框架，连接到框架的导线引导件，探针瓦片和由导线器和探针瓦片支撑的多个探针线。 每个探针线包括构造成探测诸如半导体晶片的器件的端部。 每个探针线包括信号传输部分和防护部分。 探针芯还包括由框架支撑的锁定机构。 锁定机构被配置为允许探针芯与诸如电路板的另一个测试设备或部件连接和断开。 作为一个示例，探针芯被配置为在可旋转的锁定和解锁操作或扭转锁定/解锁操作中连接和断开测试设备或组件，其中框架相对于芯的其余部分旋转以锁定/解锁探针 核心。

公开(公告)号：US07271607B1

公开(公告)日：2007-09-18

申请号：US11242610

申请日：2005-10-03

Applicant: Bryan J. Root ,  William A. Funk

Inventor： Bryan J. Root ,  William A. Funk

IPC: G01R31/02

CPC classification number: G01R1/18 ,  G01R1/0675 ,  G01R1/06772

Abstract: A probe needle apparatus and method provides a drive guard having the same potential as a probe needle for reducing signal noise in low current measurements. The probe needle apparatus includes a conductive central core covered with alternating layers of dielectric and conductive materials, a first layer of dielectric material applied to maintain electrical access to the conductive central core while providing continuous isolation of the conductive central core elsewhere, and a conductive driven guard layer applied around the first layer of dielectric material in electrical isolation from the conductive central core.

Abstract translation: 探针针装置和方法提供具有与探针相同的电位的驱动保护装置，用于在低电流测量中降低信号噪声。 探针针装置包括覆盖有电介质和导电材料的交替层的导电中心芯，用于保持对导电中心芯的电通路的第一层电介质材料，同时在其他地方提供导电中心芯的连续隔离，以及导电驱动 保护层与导电中心芯电隔离地施加在第一绝缘材料层周围。