Invention Grant
US08125641B2 Method and apparatus for phase-compensated sensitivity-enhanced spectroscopy (PCSES) 有权
用于相位补偿灵敏度增强光谱(PCSES)的方法和装置

  • Patent Title: Method and apparatus for phase-compensated sensitivity-enhanced spectroscopy (PCSES)
  • Patent Title (中): 用于相位补偿灵敏度增强光谱(PCSES)的方法和装置
  • Application No.: US12383864
    Application Date: 2009-03-27
  • Publication No.: US08125641B2
    Publication Date: 2012-02-28
  • Inventor: Guoguang Li
  • Applicant: Guoguang Li
  • Applicant Address: US CA San Jose
  • Assignee: n&k Technology, Inc.
  • Current Assignee: n&k Technology, Inc.
  • Current Assignee Address: US CA San Jose
  • Agency: Lumen Patent Firm
  • Main IPC: G01J4/00
  • IPC: G01J4/00
Method and apparatus for phase-compensated sensitivity-enhanced spectroscopy (PCSES)
Abstract:
A method and apparatus for convolving spectroscopic data with certain phase information for practicing phase-compensated sensitivity-enhanced spectroscopy (PCSES). PCSES uses a beam of radiation in a polarization state PSp from a source emitting at a plurality of wavelengths, and places in the beam a compensator capable of altering polarization state PSp by applying a delimited phase shift Δ between two orthogonal polarization axes of the radiation to restrict a finely-vibrating spectrum. A sample disposed in the beam after the compensator generates a response beam by reflection, transmission or even both. A polarization state PSa of the response beam is passed to a detector to determine a spectrum of the response beam. A first spectrum is collected when polarization states PSp, PSa and the compensator are in a first polarization-altering configuration and a second spectrum is collected when polarization states PSp, PSa and the compensator are in a second polarization-altering configuration. A phase-compensated spectrum is then derived from just the first and second spectra thereby allowing the user to undertake optical characterization, including the measurement of film thickness t and complex indices of refraction n, k of the sample with as few as just two polarization-altering configurations.
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