公开(公告)号：US20130050702A1

公开(公告)日：2013-02-28

申请号：US13696054

申请日：2011-06-01

Applicant: Guoguang Li ,  Tao Liu ,  Edgar Genio ,  Tiezhong Ma ,  Xiaolang Yan

Inventor： Guoguang Li ,  Tao Liu ,  Edgar Genio ,  Tiezhong Ma ,  Xiaolang Yan

IPC: G01J3/447

CPC classification number: G01N21/211 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0224 ,  G01N21/21

Abstract: A kind of normal incidence broadband spectroscopic polarimeter which is easy to adjust the focus, has no chromatic aberration, maintains the polarization and has simple structure. The normal incidence broadband spectroscopic polarimeter can make the probe beam normal incidence and focus on the sample surface by using at least one flat reflector element to change propagation direction of the focused beam. Moreover, the normal incidence broadband spectroscopic polarimeter contains at least one polarizer as to measure the anisotropy or non-uniform samples, such as three-dimensional profile and material optical constants of thin films consisting of the periodic structure. An optical measurement system including the normal incidence broadband spectroscopic polarimeter is also provided.

Abstract translation: 一种正常入射的宽带光谱旋光计，易于调焦，无色差，维持极化，结构简单。 正常入射的宽带光谱旋光仪可以通过使用至少一个平面反射器元件来改变聚焦光束的传播方向，使探针光束正常入射并聚焦在样品表面上。 此外，正常入射的宽带光谱旋光计包含至少一个偏振器，用于测量各向异性或非均匀样品，例如由周期性结构构成的薄膜的三维轮廓和材料光学常数。 还提供了包括正常入射宽带光谱旋光计的光学测量系统。

公开(公告)号：US07505147B1

公开(公告)日：2009-03-17

申请号：US11442208

申请日：2006-05-26

Applicant: Shuqiang Chen ,  Guoguang Li

Inventor： Shuqiang Chen ,  Guoguang Li

IPC: G01B11/24

CPC classification number: G01B11/24 ,  G03F7/70625

Abstract: Improved computation of Fourier coefficients for modeling of 2-D grating diffraction is provided. Let f(x,y) be defined in a region Ω. Typically, f(x,y) is piecewise constant (since it is a grating permittivity or inverse permittivity) and takes on various constant values in several domains in Ω. Let D be one of these domains, having a general shape. According to the invention, D is approximated as a set of trapezoids, and f(x,y) is taken to have a constant value within each of the trapezoids. Since the Fourier coefficient of a constant defined on a trapezoidal region can be analytically evaluated, an analytic approximation to the Fourier coefficient of f(x,y) on D is provided by summing the contributions from each trapezoid.

Abstract translation: 提供了用于2-D光栅衍射建模的傅里叶系数的改进计算。 令f（x，y）定义在区域Ω。 通常，f（x，y）是分段常数（因为它是光栅介电常数或反向介电常数），并且在Omega的几个域中具有各种常数值。 让D成为这些领域之一，具有一般的形状。 根据本发明，D被近似为一组梯形，并且f（x，y）被认为在每个梯形内具有恒定值。 由于可以对梯形区域中定义的常数的傅立叶系数进行分析评估，因此通过对每个梯形的贡献求和来提供D上f（x，y）的傅里叶系数的分析近似。

公开(公告)号：US07212293B1

公开(公告)日：2007-05-01

申请号：US10859252

申请日：2004-06-01

Applicant: Guoguang Li ,  Shuqiang Chen ,  Phillip Walsh

Inventor： Guoguang Li ,  Shuqiang Chen ,  Phillip Walsh

IPC: G01B11/24

CPC classification number: G01B11/24 ,  G01N21/55

Abstract: Optical characterization of lateral features of a pattern is provided. A plane-wave optical response is calculated for each feature. At least one of these plane-wave responses is calculated from an effective optical property (e.g., a waveguide modal refractive index). Such effective optical properties depend on feature geometry and on intrinsic material optical properties. The plane-wave responses for each feature are combined to generate a modeled pattern response. By fitting the modeled pattern response to a corresponding measured pattern response, estimates for pattern feature parameters are obtained. The use of an effective optical property improves model accuracy, especially for features having a size on the order of a wavelength or less, without significantly increasing computation time.

Abstract translation: 提供了图案侧向特征的光学表征。 计算每个特征的平面波光学响应。 这些平面波响应中的至少一个由有效光学特性（例如，波导模式折射率）计算。 这种有效的光学特性取决于特征几何形状和本征材料光学性质。 每个特征的平面波响应被组合以产生建模的模式响应。 通过将建模的模式响应拟合到相应的测量模式响应，获得模式特征参数的估计。 使用有效的光学特性提高了模型精确度，特别是对于具有波长或更小的量级的特征，而不显着增加计算时间。

公开(公告)号：US20140354991A1

公开(公告)日：2014-12-04

申请号：US14366637

申请日：2012-09-06

Applicant: Guoguang Li ,  Tao Liu ,  Jiangyan Zhao ,  Qingyang Guo ,  Edgar Genio ,  Tiezhong Ma ,  Yang Xia

Inventor： Guoguang Li ,  Tao Liu ,  Jiangyan Zhao ,  Qingyang Guo ,  Edgar Genio ,  Tiezhong Ma ,  Yang Xia

IPC: G01J3/447 ,  G01B11/02

CPC classification number: G01J3/447 ,  G01B11/02 ,  G01B2210/56 ,  G01J3/0208 ,  G01J3/0224 ,  G01J3/42 ,  G01N21/21 ,  G01N2021/213 ,  G02B27/14 ,  G02B27/40

Abstract: Disclosed is a normal-incidence broadband spectroscopic polarimeter containing reference beam, comprising a light source, a first reflecting unit, a first concentrating unit, a second concentrating unit, a polarizer, a first curved mirror, a first planar mirror, a second reflecting unit and a probing unit. Also disclosed is an optical measurement system, comprising the normal-incidence broadband spectroscopic polarimeter containing reference beam. The normal-incidence broadband spectroscopic polarimeter containing reference beam achieves an integral combination of the light beams after splitting, can maintain the polarization state of the light beams while increasing the light transmission efficiency, and has a low complexity.

Abstract translation: 公开了一种包含参考光束的正常入射宽带分光偏振计，包括光源，第一反射单元，第一浓缩单元，第二浓缩单元，偏振器，第一曲面镜，第一平面镜，第二反射单元 和探测单元。 还公开了一种光学测量系统，其包括含有参考光束的正常入射宽带光谱偏振计。 含有参考光束的正常入射宽带光谱旋光仪实现了分光后的光束的整体组合，可以在提高光传输效率的同时保持光束的偏振态，并且具有较低的复杂度。

公开(公告)号：US07755775B1

公开(公告)日：2010-07-13

申请号：US11542953

申请日：2006-10-03

Applicant: Guoguang Li

Inventor： Guoguang Li

IPC: G01B11/14 ,  G01J3/02 ,  G01J3/42

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01N21/8806 ,  G01N21/956

Abstract: Apparatus and method for examining a sample with a broadband radiation while preserving a small spot and low wave front distortion. The apparatus has a broadband source for generating the broadband radiation and a first reflective optics that employ toroidal mirrors that are barrel or donut-shaped and may be placed in a crossed or parallel arrangement for producing a broadband test beam that is guided to the sample such that it is incident on it at a small spot. A sampling aperture is provided for filtering a certain center portion from the broadband test beam. A second reflective optics is provided for shaping a reflected response beam from the broadband radiation that is reflected from the spot. The response beam is delivered by second reflective optics to a detector for examination. The apparatus and method can be applied to improve wave front distortion in reflectance measurements and for performing transmittance measurements with chromatic distortion compensation. The method and apparatus further provide for efficient monitoring of the broadband test beam.

Abstract translation: 用于检测具有宽带辐射的样品的装置和方法，同时保持小斑点和低波前失真。 该装置具有用于产生宽带辐射的宽带源和采用环形反射镜的第一反射光学器件，其为圆筒形或环形形状，并且可以以交叉或平行布置放置，以产生被引导到样品的宽带测试光束 它是在一个小的地方事件。 提供采样孔径用于过滤来自宽带测试光束的某个中心部分。 提供了第二反射光学器件，用于对来自该点反射的宽带辐射的反射响应光束进行成形。 响应光束由第二反射光学器件传送到检测器进行检查。 可以应用该装置和方法来改善反射率测量中的波前失真并且可以用色差失真补偿来执行透射率测量。 该方法和装置进一步提供对宽带测试光束的有效监视。

公开(公告)号：US08125641B2

公开(公告)日：2012-02-28

申请号：US12383864

申请日：2009-03-27

Applicant: Guoguang Li

Inventor： Guoguang Li

IPC: G01J4/00

CPC classification number: G01B11/0641 ,  G01J3/447 ,  G01N21/211 ,  G01N21/8422 ,  G01N2021/213

Abstract: A method and apparatus for convolving spectroscopic data with certain phase information for practicing phase-compensated sensitivity-enhanced spectroscopy (PCSES). PCSES uses a beam of radiation in a polarization state PSp from a source emitting at a plurality of wavelengths, and places in the beam a compensator capable of altering polarization state PSp by applying a delimited phase shift Δ between two orthogonal polarization axes of the radiation to restrict a finely-vibrating spectrum. A sample disposed in the beam after the compensator generates a response beam by reflection, transmission or even both. A polarization state PSa of the response beam is passed to a detector to determine a spectrum of the response beam. A first spectrum is collected when polarization states PSp, PSa and the compensator are in a first polarization-altering configuration and a second spectrum is collected when polarization states PSp, PSa and the compensator are in a second polarization-altering configuration. A phase-compensated spectrum is then derived from just the first and second spectra thereby allowing the user to undertake optical characterization, including the measurement of film thickness t and complex indices of refraction n, k of the sample with as few as just two polarization-altering configurations.

Abstract translation: 一种用于实现相位补偿灵敏度增强光谱（PCSES）的具有某些相位信息的光谱数据卷积的方法和装置。 PCSES使用来自发射多个波长的源的偏振状态PSp的辐射束，并且通过施加限定的相移＆amp; Dgr在光束中放置能够改变偏振状态PSp的补偿器; 在辐射的两个正交偏振轴之间限制细振动光谱。 在补偿器之后设置在光束中的样品通过反射，透射或甚至两者产生响应光束。 响应光束的偏振态PSa被传递到检测器以确定响应光束的光谱。 当极化状态PSp，PSa和补偿器处于第一偏振改变配置时收集第一光谱，并且当偏振态PSp，PSa和补偿器处于第二偏振改变配置时收集第二光谱。 然后，仅从第一和第二光谱导出相位补偿光谱，从而允许用户进行光学表征，包括测量膜厚度t和样品的复数折射率n，k，其中仅具有两个极化 - 改变配置

公开(公告)号：US07756677B1

公开(公告)日：2010-07-13

申请号：US11897093

申请日：2007-08-28

Applicant: Guoguang Li

Inventor： Guoguang Li

IPC: G06F3/01

CPC classification number: G01B11/0625 ,  G02B5/18 ,  G02B27/0012

Abstract: Improved optical characterization is provided by organizing the optical modeling calculations such that incident radiation parameters (e.g., wavelength) are varied in the outermost loop of any modeling run. By completing calculations for all combinations of structure parameters at one wavelength before moving to the next wavelength, calculation efficiency can be greatly improved. In particular, with this approach it is not necessary to cache (or re-compute) intermediate results pertaining to different wavelengths, in contrast to conventional approaches. Further improvements in efficiency can be obtained by organizing reflectance calculations such that for any layer Ll, stored intermediate results pertaining to layers below Ll can be used to calculate optical response as parameters for Ll and layers above Ll are varied. Similarly, transmittance calculations can be organized such that for any layer Ll, stored intermediate results pertaining to layers above Ll can be used to calculate optical response as parameters for Ll and layers below Ll are varied.

Abstract translation: 通过组织光学建模计算来提供改进的光学表征，使得入射辐射参数（例如，波长）在任何建模运行的最外循环中变化。 通过在移动到下一个波长之前完成对一个波长的结构参数的所有组合的计算，可以大大提高计算效率。 特别地，与传统方法相反，采用这种方法，不需要缓存（或重新计算）与不同波长有关的中间结果。 可以通过组织反射率计算来获得效率的进一步改进，使得对于任何层L1，可以使用属于L1以下的层的存储的中间结果来计算作为L1的L1和L1上的层的光学响应的​​光学响应。 类似地，可以组织透射率计算，使得对于任何层L1，可以使用属于L1以上的层的存储的中间结果来计算作为L1的L1和L1以下的层的光学响应。

公开(公告)号：US07397554B1

公开(公告)日：2008-07-08

申请号：US11325029

申请日：2006-01-04

Applicant: Guoguang Li ,  Marc Aho

Inventor： Guoguang Li ,  Marc Aho

IPC: G01N21/00

CPC classification number: H01L21/67294 ,  G01N21/9501 ,  H01L21/67011 ,  H01L21/67288

Abstract: An apparatus and method for examining features of a planar, disk-shaped samples on a stage that holdings the sample and has an X-drive, a Y-drive and a θ-drive for rotating the stage about a center of rotation defined in the stage coordinates. The sample is placed on the stage such that the center of the sample is substantially aligned with the center of rotation and a measurement assembly is located above the sample to examine the features optically. A scheduling module coordinates the X-drive, the Y-drive and the θ-drive with the measurement assembly such that the sample is examined in an even number n of angular sectors defined by a sector angle Θ that is the same for each sector. Specifically, the sector angle Θ is defined in terms of n as follows: Θ = 360 ⁢ ° n , where n=4m and m is an integer, such that a multiple of sector angle Θ always includes angles 90° and 180°.

Abstract translation: 一种用于检查在保持样品并具有X驱动器，Y驱动器和θ驱动器的平台上的平面盘形样本的特征的装置和方法，用于围绕围绕所述样本的旋转中心旋转所述平台 舞台坐标。 将样品放置在平台上，使得样品的中心基本上与旋转中心对准，并且测量组件位于样品上方以光学检查特征。 调度模块通过测量组件来协调X驱动器，Y驱动器和θ驱动器，使得样本以偶数n个由对于每个扇区相同的扇形角度θ定义的角度扇区进行检查。 具体来说，扇区角度θ由n定义如下：