Invention Grant
US08241940B2 Double-sided reusable template for fabrication of semiconductor substrates for photovoltaic cell and microelectronics device manufacturing
有权
用于制造用于光伏电池和微电子器件制造的半导体衬底的双面可重复使用的模板
- Patent Title: Double-sided reusable template for fabrication of semiconductor substrates for photovoltaic cell and microelectronics device manufacturing
- Patent Title (中): 用于制造用于光伏电池和微电子器件制造的半导体衬底的双面可重复使用的模板
-
Application No.: US13026239Application Date: 2011-02-12
-
Publication No.: US08241940B2Publication Date: 2012-08-14
- Inventor: Mehrdad M. Moslehi , Karl-Josef Kramer , David Xuan-Qi Wang , Pawan Kapur , Somnath Nag , George D Kamian , Jay Ashjaee , Takao Yonehara
- Applicant: Mehrdad M. Moslehi , Karl-Josef Kramer , David Xuan-Qi Wang , Pawan Kapur , Somnath Nag , George D Kamian , Jay Ashjaee , Takao Yonehara
- Applicant Address: US CA Milpitas
- Assignee: Solexel, Inc.
- Current Assignee: Solexel, Inc.
- Current Assignee Address: US CA Milpitas
- Agency: Hulsey, P.C.
- Agent William N. Hulsey, III; Loren T. Smith
- Main IPC: H01L21/00
- IPC: H01L21/00
Abstract:
This disclosure presents manufacturing methods and apparatus designs for making TFSSs from both sides of a re-usable semiconductor template, thus effectively increasing the substrate manufacturing throughput and reducing the substrate manufacturing cost. This approach also reduces the amortized starting template cost per manufactured substrate (TFSS) by about a factor of 2 for a given number of template reuse cycles.
Public/Granted literature
Information query
IPC分类:
