Invention Grant
- Patent Title: Cathode and counter-cathode arrangement in an ion source
- Patent Title (中): 离子源中的阴极和反阴极排列
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Application No.: US11886526Application Date: 2006-03-22
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Publication No.: US08281738B2Publication Date: 2012-10-09
- Inventor: Andrew Stephen Devaney , Richard David Goldberg , Christopher Burgess , David George Armour , David Kirkwood
- Applicant: Andrew Stephen Devaney , Richard David Goldberg , Christopher Burgess , David George Armour , David Kirkwood
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Boult Wade Tennant
- Priority: GB0505856.5 20050322
- International Application: PCT/GB2006/001060 WO 20060322
- International Announcement: WO2006/100487 WO 20060928
- Main IPC: H01J27/02
- IPC: H01J27/02

Abstract:
The present invention relates to ion sources (14) comprising a cathode (20) and a counter-cathode (44) that are suitable for ion implanters (10). Typically, the ion source is held under vacuum and produces ions using a plasma generated within an arc chamber (16). Plasma ions are extracted from the arc chamber and subsequently implanted in a semiconductor wafer (12). The ion source according to the present invention further comprises a cathode (40) arranged to emit electrons into the arc chamber; an electrode (44) positioned in the arc chamber such that electrons emitted by the cathode are incident thereon; one or more voltage potential sources (76) arranged to bias the electrode; and a voltage potential adjuster (82) operable to switch between the voltage potential source biasing the electrode positively thereby to act as an anode and the voltage potential source biasing the electrode negatively thereby to act as a counter-cathode.
Public/Granted literature
- US20090211896A1 Cathode and Counter-Cathode Arrangement in an Ion Source Public/Granted day:2009-08-27
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