Invention Grant
- Patent Title: Minute measuring instrument for high speed and large area and method thereof
- Patent Title (中): 用于高速大面积的分钟测量仪及其方法
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Application No.: US12666064Application Date: 2008-11-11
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Publication No.: US08300221B2Publication Date: 2012-10-30
- Inventor: Yong Jai Cho , Won Chegal , Hyun Mo Cho
- Applicant: Yong Jai Cho , Won Chegal , Hyun Mo Cho
- Applicant Address: KR
- Assignee: Korea Research Institute of Standards and Science
- Current Assignee: Korea Research Institute of Standards and Science
- Current Assignee Address: KR
- Agency: Cantor Colburn LLP
- Priority: KR10-2007-0116340 20071114
- International Application: PCT/KR2008/006641 WO 20081111
- International Announcement: WO2009/064103 WO 20090522
- Main IPC: G01J4/00
- IPC: G01J4/00
Abstract:
The present invention relates to a minute measuring instrument for high speed and large area and a method thereof, and more particularly, to a minute measuring instrument for high speed and large area which measures properties of a specimen in high speed by a focused-beam ellipsometric part and then minutely remeasures the position showing a singular point by a minute measuring part and a method thereof.
Public/Granted literature
- US20100321693A1 MINUTE MEASURING INSTRUMENT FOR HIGH SPEED AND LARGE AREA AND THE METHOD OF THEREOF Public/Granted day:2010-12-23
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