Invention Grant
US08314469B2 Image sensor structure with different pitches or shapes of microlenses 有权
具有不同间距或形状的微透镜的图像传感器结构

  • Patent Title: Image sensor structure with different pitches or shapes of microlenses
  • Patent Title (中): 具有不同间距或形状的微透镜的图像传感器结构
  • Application No.: US12553987
    Application Date: 2009-09-04
  • Publication No.: US08314469B2
    Publication Date: 2012-11-20
  • Inventor: Cheng-Hung Yu
  • Applicant: Cheng-Hung Yu
  • Applicant Address: TW Science-Based Industrial Park, Hsin-Chu
  • Assignee: United Microelectronics Corp.
  • Current Assignee: United Microelectronics Corp.
  • Current Assignee Address: TW Science-Based Industrial Park, Hsin-Chu
  • Agent Winston Hsu; Scott Margo
  • Main IPC: H01L31/0232
  • IPC: H01L31/0232
Image sensor structure with different pitches or shapes of microlenses
Abstract:
An image sensor structure and a method for making the image sensor structure, for avoiding or mitigating lens shading effect. The image sensor structure includes a substrate, a sensor array disposed at the surface of the substrate, a dielectric layer covering the sensor array, wherein the dielectric layer includes a top surface having a dishing structure, an under layer filled into the dishing structure and having a refraction index greater than that of the dielectric layer, a filter array disposed on the under layer corresponding to the sensor array, and a microlens array disposed above the filter array. A top layer may be additionally disposed to cover the filter array and the microlens array is disposed on the top layer.
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