Invention Grant
- Patent Title: Conductive polishing pad and method for making the same
- Patent Title (中): 导电抛光垫及其制造方法
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Application No.: US12427259Application Date: 2009-04-21
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Publication No.: US08343586B2Publication Date: 2013-01-01
- Inventor: Chung-Chih Feng , I-Peng Yao , Yung-Chang Hung , Chun-Ta Wang
- Applicant: Chung-Chih Feng , I-Peng Yao , Yung-Chang Hung , Chun-Ta Wang
- Applicant Address: TW Taoyuan County
- Assignee: Bestac Advanced Material Co., Ltd.
- Current Assignee: Bestac Advanced Material Co., Ltd.
- Current Assignee Address: TW Taoyuan County
- Agency: WPAT, P.C.
- Agent Anthony King
- Priority: TW97143727A 20081112
- Main IPC: B05D1/36
- IPC: B05D1/36 ; B05D7/00

Abstract:
The present invention relates to a conductive polishing pad and a method for making the same. The conductive polishing pad includes a bottom layer, a conductive film and a polishing layer. The bottom layer includes a first high polymer and a fiber base. The first high polymer covers the fiber base, and has a plurality of first holes. The conductive film is disposed on the bottom layer. The polishing layer is disposed on the conductive film, and includes a second high polymer. The second high polymer has a plurality of second holes. Even though the bottom layer and the polishing layer are poor conductors, the conductivity thereof is raised by the conductive film, so that the polishing pad has good conductivity. Further, the polishing pad has a flexible surface, which prevents a surface of a workpiece to be polished from being scratched during polishing.
Public/Granted literature
- US20100119811A1 CONDUCTIVE POLISHING PAD AND METHOD FOR MAKING THE SAME Public/Granted day:2010-05-13
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