Invention Grant
- Patent Title: Image sensor and method for fabricating the same
- Patent Title (中): 图像传感器及其制造方法
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Application No.: US12615268Application Date: 2009-11-10
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Publication No.: US08357890B2Publication Date: 2013-01-22
- Inventor: Chi-Chung Chen , Wen-Chen Chiang , Yu-Tsung Lin
- Applicant: Chi-Chung Chen , Wen-Chen Chiang , Yu-Tsung Lin
- Applicant Address: TW Science-Based Industrial Park, Hsin-Chu
- Assignee: United Microelectronics Corp.
- Current Assignee: United Microelectronics Corp.
- Current Assignee Address: TW Science-Based Industrial Park, Hsin-Chu
- Agent Winston Hsu; Scott Margo
- Main IPC: G01J3/50
- IPC: G01J3/50 ; H01L27/00 ; H01L31/00 ; H01L27/146

Abstract:
A method for fabricating image sensor is disclosed. The method includes the steps of: providing a substrate, wherein the substrate comprises a plurality of photodiodes; forming at least one dielectric layer and a passivation layer on surface of the substrate; using a patterned photomask to perform a first pattern transfer process for forming a plurality of trenches corresponding to each photodiode in the passivation layer; forming a plurality of color filters in the trenches; covering a planarizing layer on the color filters; and using the patterned photomask to perform a second pattern transfer process for forming a plurality of microlenses corresponding to each color filter on the planarizing layer.
Public/Granted literature
- US20110108715A1 IMAGE SENSOR AND METHOD FOR FABRICATING THE SAME Public/Granted day:2011-05-12
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