Invention Grant
- Patent Title: Spin coating device
- Patent Title (中): 旋涂装置
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Application No.: US12888423Application Date: 2010-09-23
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Publication No.: US08402912B2Publication Date: 2013-03-26
- Inventor: Shao-Kai Pei
- Applicant: Shao-Kai Pei
- Applicant Address: TW New Taipei
- Assignee: Hon Hai Precision Industry Co., Ltd.
- Current Assignee: Hon Hai Precision Industry Co., Ltd.
- Current Assignee Address: TW New Taipei
- Agency: Altis Law Group, Inc.
- Priority: CN201010150151 20100419
- Main IPC: B05B3/00
- IPC: B05B3/00 ; B05B3/10 ; B05B7/06 ; B05C5/00 ; B05C3/00 ; B01F15/00

Abstract:
A spin coating device includes a container and a rotating member. The container is used for holding a first solution and includes a sidewall which a plurality of substrates are arranged on. The rotating member is rotatable within the container and includes an inlet and at least one outlet. A second solution flows into the rotating member through the inlet, and flows into the container through the at lease one outlet. A mixture of the first solution and the second solution is spread onto the substrate by centrifugal force of the rotating member.
Public/Granted literature
- US20110253038A1 SPIN COATING DEVICE Public/Granted day:2011-10-20
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