Invention Grant
- Patent Title: X-ray detector for electron microscope
-
Application No.: US13855373Application Date: 2013-04-02
-
Publication No.: US08592764B2Publication Date: 2013-11-26
- Inventor: Hanno Sebastian von Harrach , Bert Henning Freitag , Pleun Dona
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, PC
- Agent Michael O. Scheinberg
- Main IPC: H01J37/244
- IPC: H01J37/244 ; H01J37/26 ; H01J49/06 ; G01N23/225 ; H01J37/28

Abstract:
Multiple detectors arranged in a ring within a specimen chamber provide a large solid angle of collection. The detectors preferably include a shutter and a cold shield that reduce ice formation on the detector. By providing detectors surrounding the sample, a large solid angle is provided for improved detection and x-rays are detected regardless of the direction of sample tilt.
Public/Granted literature
- US20130240731A1 X-RAY DETECTOR FOR ELECTRON MICROSCOPE Public/Granted day:2013-09-19
Information query