Invention Grant
US08746975B2 Thermal management systems, assemblies and methods for grazing incidence collectors for EUV lithography
有权
用于EUV光刻的放电收集器的热管理系统,组件和方法
- Patent Title: Thermal management systems, assemblies and methods for grazing incidence collectors for EUV lithography
- Patent Title (中): 用于EUV光刻的放电收集器的热管理系统,组件和方法
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Application No.: US13355725Application Date: 2012-01-23
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Publication No.: US08746975B2Publication Date: 2014-06-10
- Inventor: Giovanni Bianucci , Fabio Zocchi , Robert Banham , Marco Pedrali , Boris Grek , Natale Ceglio , Dean Shough , Gordon Yue , Daniel Stearns , Richard A. Levesque , Giuseppe Valsecchi
- Applicant: Giovanni Bianucci , Fabio Zocchi , Robert Banham , Marco Pedrali , Boris Grek , Natale Ceglio , Dean Shough , Gordon Yue , Daniel Stearns , Richard A. Levesque , Giuseppe Valsecchi
- Applicant Address: IT Bosisio Parini (LC)
- Assignee: Media Lario S.R.L.
- Current Assignee: Media Lario S.R.L.
- Current Assignee Address: IT Bosisio Parini (LC)
- Agency: Opticus IP Law PLLC
- Main IPC: H01J35/02
- IPC: H01J35/02 ; H01J35/16 ; G21K1/06

Abstract:
Systems, assemblies and methods for thermally managing a grazing incidence collector (GIC) for EUV lithography applications are disclosed. The GIC thermal management assembly includes a GIC mirror shell interfaced with a jacket to form a sealed chamber. An open cell, heat transfer (OCHT) material is disposed within the metal chamber and is thermally and mechanically bonded with the GIC mirror shell and jacket. A coolant is flowed in an azimuthally symmetric fashion through the OCHT material between input and output plenums to effectuate cooling when the GIC thermal management assembly is used in a GIC mirror system configured to receive and form collected EUV radiation from an EUV radiation source.
Public/Granted literature
- US20120212719A1 THERMAL MANAGEMENT SYSTEMS, ASSEMBLIES AND METHODS FOR GRAZING INCIDENCE COLLECTORS FOR EUV LITHOGRAPHY Public/Granted day:2012-08-23
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