Invention Grant
US08746975B2 Thermal management systems, assemblies and methods for grazing incidence collectors for EUV lithography 有权
用于EUV光刻的放电收集器的热管理系统,组件和方法

Thermal management systems, assemblies and methods for grazing incidence collectors for EUV lithography
Abstract:
Systems, assemblies and methods for thermally managing a grazing incidence collector (GIC) for EUV lithography applications are disclosed. The GIC thermal management assembly includes a GIC mirror shell interfaced with a jacket to form a sealed chamber. An open cell, heat transfer (OCHT) material is disposed within the metal chamber and is thermally and mechanically bonded with the GIC mirror shell and jacket. A coolant is flowed in an azimuthally symmetric fashion through the OCHT material between input and output plenums to effectuate cooling when the GIC thermal management assembly is used in a GIC mirror system configured to receive and form collected EUV radiation from an EUV radiation source.
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