Invention Grant
- Patent Title: Chromatic aberration corrector and electron microscope
- Patent Title (中): 色差校正器和电子显微镜
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Application No.: US14102838Application Date: 2013-12-11
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Publication No.: US08785880B2Publication Date: 2014-07-22
- Inventor: Hidetaka Sawada , Fumio Hosokawa
- Applicant: JEOL Ltd.
- Applicant Address: JP Tokyo
- Assignee: JEOL Ltd.
- Current Assignee: JEOL Ltd.
- Current Assignee Address: JP Tokyo
- Agency: The Webb Law Firm
- Priority: JP2012-270069 20121211
- Main IPC: G21K1/08
- IPC: G21K1/08 ; H01J3/14 ; H01J3/26 ; H01J49/42

Abstract:
The chromatic aberration corrector (100) has a first multipole element (110) for producing a first electromagnetic field and a second multipole element (120) for producing a second electromagnetic field. The first multipole element (110) first, second, and third portions (110a, 110b, 110c) arranged along an optical axis (OA) having a thickness and producing a quadrupole field in which an electric quadrupole field and a magnetic quadrupole field are superimposed. In the first and third portions (110a, 110c), the electric quadrupole field is set stronger than the magnetic quadrupole field. In the second portion (110b), the magnetic quadrupole field is set stronger than the electric quadrupole field. The second portion (110b) produces a two-fold astigmatism component that is opposite in sign to two-fold astigmatism components produced by the first portion (110a) and third portion (110c).
Public/Granted literature
- US20140158901A1 CHROMATIC ABERRATION CORRECTOR AND ELECTRON MICROSCOPE Public/Granted day:2014-06-12
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