公开(公告)号：US10020162B2

公开(公告)日：2018-07-10

申请号：US15451546

申请日：2017-03-07

Applicant: JEOL Ltd.

Inventor： Yuko Shimizu ,  Akira Yasuhara ,  Kazuya Yamazaki ,  Fumio Hosokawa

IPC: G01N23/00 ,  H01J37/147 ,  H01J37/28 ,  H01J37/20 ,  H01J37/22 ,  H01J37/26

CPC classification number: H01J37/1478 ,  H01J37/1471 ,  H01J37/20 ,  H01J37/222 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/1506 ,  H01J2237/221 ,  H01J2237/223 ,  H01J2237/2802

Abstract: There is provided a beam alignment method capable of easily aligning an electron beam with a coma-free axis in an electron microscope. The method starts with tilting the electron beam (EB) in a first direction (+X) relative to a reference axis (A) and obtaining a first TEM (transmission electron microscope) image. Then, the beam is tilted in a second direction (−X) relative to the reference axis, the second direction (−X) being on the opposite side of the reference axis (A) from the first direction (+X), and a second TEM image is obtained. The reference axis is incrementally varied so as to reduce the brightness of the differential image between a power spectrum of the first TEM image and a power spectrum of the second TEM image.

公开(公告)号：US08785880B2

公开(公告)日：2014-07-22

申请号：US14102838

申请日：2013-12-11

Applicant: JEOL Ltd.

Inventor： Hidetaka Sawada ,  Fumio Hosokawa

IPC: G21K1/08 ,  H01J3/14 ,  H01J3/26 ,  H01J49/42

CPC classification number: H01J37/153 ,  H01J37/26 ,  H01J2237/12 ,  H01J2237/1405 ,  H01J2237/1534

Abstract: The chromatic aberration corrector (100) has a first multipole element (110) for producing a first electromagnetic field and a second multipole element (120) for producing a second electromagnetic field. The first multipole element (110) first, second, and third portions (110a, 110b, 110c) arranged along an optical axis (OA) having a thickness and producing a quadrupole field in which an electric quadrupole field and a magnetic quadrupole field are superimposed. In the first and third portions (110a, 110c), the electric quadrupole field is set stronger than the magnetic quadrupole field. In the second portion (110b), the magnetic quadrupole field is set stronger than the electric quadrupole field. The second portion (110b) produces a two-fold astigmatism component that is opposite in sign to two-fold astigmatism components produced by the first portion (110a) and third portion (110c).

Abstract translation: 色差校正器（100）具有用于产生第一电磁场的第一多极元件（110）和用于产生第二电磁场的第二多极元件（120）。 第一多极元件（110）沿着具有厚度并且产生四极场的光轴（OA）布置的第一，第二和第三部分（110a，110b，110c），其中电四极场和四极磁场被叠加 。 在第一和第三部分（110a，110c）中，电四极场被设置为比四极四极场强。 在第二部分（110b）中，将四极四极场设置得比电四极场强。 第二部分（110b）产生与由第一部分（110a）和第三部分（110c）产生的两折像散分量相反的双折射散光成分。

公开(公告)号：US20140054468A1

公开(公告)日：2014-02-27

申请号：US13771403

申请日：2013-02-20

Applicant: JEOL Ltd.

Inventor： Fumio Hosokawa

IPC: H01J37/02

CPC classification number: H01J37/02 ,  H01J37/153 ,  H01J37/26 ,  H01J2237/1534

Abstract: A chromatic aberration corrector and method of controlling this chromatic aberration corrector is offered. The corrector has first and second multipole lenses for producing quadrupole fields and first and second transfer lenses each having a focal length of f. The first and second multipole lenses are arranged on opposite sides of the first and second transfer lenses. The distance between the first multipole lens and the first transfer lens is f. The distance between the first transfer lens and the second transfer lens is 2f. The distance between the second transfer lens and the second multipole lens is f−Δ. The corrector is so designed that the relationship, f>Δ>0, holds.

Abstract translation: 提供色差校正器和控制该色像差校正器的方法。 校正器具有用于产生四极场的第一和第二多极透镜，每个焦距为f的第一和第二转印透镜。 第一和第二多极透镜布置在第一和第二转印透镜的相对侧上。 第一多极透镜和第一转印透镜之间的距离为f。 第一转印透镜和第二转印透镜之间的距离为2f。 第二转印透镜和第二多极透镜之间的距离为f-Delta。 校正器的设计使得关系f> Delta> 0成立。

公开(公告)号：US20140158901A1

公开(公告)日：2014-06-12

申请号：US14102838

申请日：2013-12-11

Applicant: JEOL Ltd.

Inventor： Hidetaka Sawada ,  Fumio Hosokawa

IPC: H01J37/153

CPC classification number: H01J37/153 ,  H01J37/26 ,  H01J2237/12 ,  H01J2237/1405 ,  H01J2237/1534

Abstract: The chromatic aberration corrector (100) has a first multipole element (110) for producing a first electromagnetic field and a second multipole element (120) for producing a second electromagnetic field. The first multipole element (110) first, second, and third portions (110a, 110b, 110c) arranged along an optical axis (OA) having a thickness and producing a quadrupole field in which an electric quadrupole field and a magnetic quadrupole field are superimposed. In the first and third portions (110a, 110c), the electric quadrupole field is set stronger than the magnetic quadrupole field. In the second portion (110b), the magnetic quadrupole field is set stronger than the electric quadrupole field. The second portion (110b) produces a two-fold astigmatism component that is opposite in sign to two-fold astigmatism components produced by the first portion (110a) and third portion (110c).

Abstract translation: 色差校正器（100）具有用于产生第一电磁场的第一多极元件（110）和用于产生第二电磁场的第二多极元件（120）。 第一多极元件（110）沿着具有厚度并且产生四极场的光轴（OA）布置的第一，第二和第三部分（110a，110b，110c），其中电四极场和四极磁场被叠加 。 在第一和第三部分（110a，110c）中，电四极场被设置为比四极四极场强。 在第二部分（110b）中，将四极四极场设置得比电四极场强。 第二部分（110b）产生与由第一部分（110a）和第三部分（110c）产生的两折像散分量相反的双折射散光成分。

公开(公告)号：US20170301507A1

公开(公告)日：2017-10-19

申请号：US15451546

申请日：2017-03-07

Applicant: JEOL Ltd.

Inventor： Yuko Shimizu ,  Akira Yasuhara ,  Kazuya Yamazaki ,  Fumio Hosokawa

IPC: H01J37/147 ,  H01J37/28 ,  H01J37/20 ,  H01J37/22

CPC classification number: H01J37/1478 ,  H01J37/1471 ,  H01J37/20 ,  H01J37/222 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/1506 ,  H01J2237/221 ,  H01J2237/223 ,  H01J2237/2802

Abstract: There is provided a beam alignment method capable of easily aligning an electron beam with a coma-free axis in an electron microscope. The method starts with tilting the electron beam (EB) in a first direction (+X) relative to a reference axis (A) and obtaining a first TEM (transmission electron microscope) image. Then, the beam is tilted in a second direction (−X) relative to the reference axis, the second direction (−X) being on the opposite side of the reference axis (A) from the first direction (+X), and a second TEM image is obtained. The reference axis is incrementally varied so as to reduce the brightness of the differential image between a power spectrum of the first TEM image and a power spectrum of the second TEM image.

公开(公告)号：US08952339B2

公开(公告)日：2015-02-10

申请号：US13771403

申请日：2013-02-20

Applicant: JEOL Ltd.

Inventor： Fumio Hosokawa

IPC: H01J37/02 ,  H01J37/153 ,  H01J37/26

CPC classification number: H01J37/02 ,  H01J37/153 ,  H01J37/26 ,  H01J2237/1534

Abstract: A chromatic aberration corrector and method of controlling this chromatic aberration corrector is offered. The corrector has first and second multipole lenses for producing quadrupole fields and first and second transfer lenses each having a focal length of f. The first and second multipole lenses are arranged on opposite sides of the first and second transfer lenses. The distance between the first multipole lens and the first transfer lens is f. The distance between the first transfer lens and the second transfer lens is 2f. The distance between the second transfer lens and the second multipole lens is f−Δ. The corrector is so designed that the relationship, f>Δ>0, holds.

Abstract translation: 提供色差校正器和控制该色像差校正器的方法。 校正器具有用于产生四极场的第一和第二多极透镜，每个焦距为f的第一和第二转印透镜。 第一和第二多极透镜布置在第一和第二转印透镜的相对侧上。 第一多极透镜和第一转印透镜之间的距离为f。 第一转印透镜和第二转印透镜之间的距离为2f。 第二转印透镜和第二多极透镜之间的距离为f-＆Dgr。 校正器的设计使得关系f>＆Dgr>> 0成立。