Invention Grant
US08835869B2 Ion sources and methods for generating an ion beam with controllable ion current density distribution 有权
用于产生具有可控离子电流密度分布的离子束的离子源和方法

Ion sources and methods for generating an ion beam with controllable ion current density distribution
Abstract:
Ion sources and methods for generating an ion bean with a controllable ion current density distribution. The ion source includes a discharge chamber having an optical grid position proximate at a first end and a re-entrant vessel positioned proximate a second end that opposes the first end. A plasma shaper extends from the re-entrant vessel and into the plasma discharge chamber. A position of the plasma shaper is adjustable relative to the grid-based ion optic such that the plasma shaper may operably change a plasma density distribution within the discharge chamber.
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