Invention Grant
- Patent Title: Scanning electron microscope
- Patent Title (中): 扫描电子显微镜
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Application No.: US13981685Application Date: 2011-11-11
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Publication No.: US08927931B2Publication Date: 2015-01-06
- Inventor: Masanori Seoka , Kazushige Nakagawa
- Applicant: Masanori Seoka , Kazushige Nakagawa
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Mattingly & Malur, PC
- Priority: JP2011-049761 20110308
- International Application: PCT/JP2011/006307 WO 20111111
- International Announcement: WO2012/120576 WO 20120913
- Main IPC: H01J37/28
- IPC: H01J37/28 ; H01J37/147 ; H01J37/153 ; H01J37/26

Abstract:
In conventional electron microscopes, orthogonality has been defined for each electron microscope individually in such a manner that a lattice sample is observed, and correction is applied to a control circuit so that the sample is observed as being orthogonal on a screen. Further, the correction has been determined by visual observation on a screen, and manually performed by a human operator. However, in this method, due to manufacturing variation of a lattice sample, the orthogonality may vary between devices. Further, there has been a problem in that the accuracy of correction varies by manually performing the correction. In order to solve the above problems, a particulate sample is used instead of a lattice sample for defining orthogonality, and adjustment is performed so that an image that should be a circle is observed as a circle, thereby making it possible to define the orthogonality.
Public/Granted literature
- US20130306864A1 SCANNING ELECTRON MICROSCOPE Public/Granted day:2013-11-21
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