Invention Grant
- Patent Title: Mass spectrometry device including self-cleaning unit
- Patent Title (中): 质谱装置包括自清洁装置
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Application No.: US14123310Application Date: 2012-04-09
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Publication No.: US08933399B2Publication Date: 2015-01-13
- Inventor: Makoto Sampei
- Applicant: Makoto Sampei
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Mattingly & Malur, PC
- Priority: JP2011-124764 20110603
- International Application: PCT/JP2012/059681 WO 20120409
- International Announcement: WO2012/165053 WO 20121206
- Main IPC: H01J49/40
- IPC: H01J49/40 ; H01J49/10 ; G01N33/18 ; H01J49/02 ; H01J37/32 ; G01N27/62 ; H01J49/06

Abstract:
When a specimen from a specimen ionizing unit is not sufficiently ionized, is caused to remain in sites other than a pore in an introducing section and be deposited as a product such as an oxide or carbide, which causes a deterioration in the performance of the mass spectrometry device. The mass spectrometry device has a specimen ionizing section for ionizing a specimen, a specimen-introduction regulating chamber into which ions of the ionized specimen are introduced, a differential evacuation chamber located downstream of the specimen-introduction regulating chamber, and an analyzing section located at the downstream side of the differential evacuation chamber, in which a discharge generating means is formed for generating an electric discharge inside the specimen-introduction regulating chamber and/or the differential evacuation chamber. The discharge generating means has a specimen introducing section electrode and a first-pore-section-forming member located oppositely to each other inside the specimen-introduction regulating chamber.
Public/Granted literature
- US20140103207A1 MASS SPECTROMETRY DEVICE Public/Granted day:2014-04-17
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