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US08964187B2 Micro-machined imaging interferometer having a static interferometric cavity 有权
具有静态干涉腔的微加工成像干涉仪

Micro-machined imaging interferometer having a static interferometric cavity
Abstract:
A micro-machined optical measuring device including: a set of photosensitive detector elements situated on a given face of a first support; a second support, assembled to the first support, forming a prism and including a first face through which a visible radiation is intended to penetrate and a second face, forming a non-zero angle θ with the first face and a non-zero angle α with the given face of the first support, the second face being semi-reflective, the first support and the second support being positioned such that an interferometric cavity is made between the second face and the given face, the distance between the given face of the first support and the second face of the second support varying regularly.
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