Invention Grant
US08987657B2 Spatial filter measuring arrangement, device, and associated method having a mirror array with movable mirror elements for generating a grating structure
有权
具有具有用于产生光栅结构的可移动镜元件的反射镜阵列的空间滤波器测量装置，装置和相关方法
- Patent Title: Spatial filter measuring arrangement, device, and associated method having a mirror array with movable mirror elements for generating a grating structure
- Patent Title (中): 具有具有用于产生光栅结构的可移动镜元件的反射镜阵列的空间滤波器测量装置，装置和相关方法
-
Application No.: US13512103Application Date: 2010-10-12
-
Publication No.: US08987657B2Publication Date: 2015-03-24
- Inventor: Martin Degner , Nils Damaschke , Martin Schaeper , Ingolf Menn
- Applicant: Martin Degner , Nils Damaschke , Martin Schaeper , Ingolf Menn
- Applicant Address: DE Dresden-Langebruck
- Assignee: Micro-Epsilon Optronic GmbH
- Current Assignee: Micro-Epsilon Optronic GmbH
- Current Assignee Address: DE Dresden-Langebruck
- Agency: Alston & Bird LLP
- Priority: DE102009047198 20091126
- International Application: PCT/EP2010/006226 WO 20101012
- International Announcement: WO2011/063876 WO 20110603
- Main IPC: G01J3/50
- IPC: G01J3/50 ; G01P3/36 ; G01P5/26
Abstract:
The invention relates to a spatial filter measuring arrangement (1) and a spatial filter measuring device (2) comprising at least one sensor (4, 5; 41I-41IV; 51) and a spatial filter, wherein electromagnetic radiation, in particular light, that is emitted or reflected by a measurement object (13), is imaged onto the sensor (4, 5; 41I-41IV; 51, 52) by means of the spatial filter. The invention further relates to a method for spatial filter measurement. The spatial filter measuring arrangement according to the invention is further developed in that the spatial filter is designed as a micro-mirror array which has mirror elements (21-21′″) which can be moved about respective angular positions.
Public/Granted literature
- US20130001401A1 Microarray-Based Spatial Filter Public/Granted day:2013-01-03
Information query
