公开(公告)号：US20120006098A1

公开(公告)日：2012-01-12

申请号：US13141380

申请日：2009-12-10

Applicant: Martin Degner ,  Hartmut Ewald ,  Nils Damaschke ,  Elfred Lewis

Inventor： Martin Degner ,  Hartmut Ewald ,  Nils Damaschke ,  Elfred Lewis

IPC: G01J3/42

CPC classification number: G01N21/33 ,  G01J3/02 ,  G01J3/0297 ,  G01J3/42 ,  G01N21/0303 ,  G01N21/274 ,  G01N21/31 ,  G01N21/3504 ,  G01N2021/0307 ,  G01N2201/062 ,  G01N2201/0631 ,  G01N2201/0668 ,  G01N2201/08

Abstract: The invention relates to a method and to a device for using partially non-stabilized broadband light sources to accurately measure partially broadband-absorbing substances using referencing measuring cells. In order to create a low-cost, high-resolution, and at the same time fast spectrographic device for measuring concentrations of substances in fluid or gaseous media that is also suitable for harsh environments, the light radiated by the broadband light sources (1) through light guiding optical systems is fed through the measuring section of the self-referencing measuring cell (20, 30, 40) or only partially through a measuring cell (10) to a measurement detector (photoreceptor 11) and partially through a reference path (optical waveguide 8) to a reference detector (photoreceptor 15), and a mode coupler (5, 9, 14) is associated with each optical waveguide (2, 4, 7, 8) in order to homogenize the radiation characteristic of the broadband light sources (1), which varies over time and space.

Abstract translation: 本发明涉及一种使用部分非稳定的宽带光源使用参考测量单元精确测量部分宽带吸收物质的方法和装置。 为了创建低成本，高分辨率，同时快速的光谱设备，用于测量也适用于恶劣环境的流体或气体介质中的物质浓度，宽带光源辐射的光（1） 通过光引导光学系统通过自参考测量单元（20,30,40）的测量部分或仅部分地通过测量单元（10）馈送到测量检测器（感光体11），并且部分地通过参考路径 光波导8）到参考检测器（感光体15），并且模式耦合器（5,9,14）与每个光波导（2,4,7,8）相关联，以便使宽带光的辐射特性均匀化 来源（1），随时间和空间而变化。

公开(公告)号：US08987657B2

公开(公告)日：2015-03-24

申请号：US13512103

申请日：2010-10-12

Applicant: Martin Degner ,  Nils Damaschke ,  Martin Schaeper ,  Ingolf Menn

Inventor： Martin Degner ,  Nils Damaschke ,  Martin Schaeper ,  Ingolf Menn

IPC: G01J3/50 ,  G01P3/36 ,  G01P5/26

CPC classification number: G01P3/36 ,  G01P5/26

Abstract: The invention relates to a spatial filter measuring arrangement (1) and a spatial filter measuring device (2) comprising at least one sensor (4, 5; 41I-41IV; 51) and a spatial filter, wherein electromagnetic radiation, in particular light, that is emitted or reflected by a measurement object (13), is imaged onto the sensor (4, 5; 41I-41IV; 51, 52) by means of the spatial filter. The invention further relates to a method for spatial filter measurement. The spatial filter measuring arrangement according to the invention is further developed in that the spatial filter is designed as a micro-mirror array which has mirror elements (21-21′″) which can be moved about respective angular positions.

Abstract translation: 本发明涉及一种空间滤波器测量装置（1）和包括至少一个传感器（4,5; 41I-41IV; 51）和空间滤波器的空间滤波器测量装置（2），其中电磁辐射，特别是光， 由测量对象（13）发射或反射的信号通过空间滤波器成像到传感器（4,51; 41I-41IV; 51,52）上。 本发明还涉及一种用于空间滤波器测量的方法。 进一步开发了根据本发明的空间滤波器测量装置，其中空间滤波器被设计为具有镜像元件（21-21“）的微镜阵列，其可以在各自的角位置移动。

公开(公告)号：US20130001401A1

公开(公告)日：2013-01-03

申请号：US13512103

申请日：2010-10-12

Applicant: Martin Degner ,  Nils Damaschke ,  Martin Schaeper ,  Ingolf Menn

Inventor： Martin Degner ,  Nils Damaschke ,  Martin Schaeper ,  Ingolf Menn

IPC: H01L31/0232 ,  H01L27/146

CPC classification number: G01P3/36 ,  G01P5/26

Abstract: The invention relates to a spatial filter measuring arrangement (1) and a spatial filter measuring device (2) comprising at least one sensor (4, 5; 41I-41IV; 51) and a spatial filter, wherein electromagnetic radiation, in particular light, that is emitted or reflected by a measurement object (13), is imaged onto the sensor (4, 5; 41I-41IV; 51, 52) by means of the spatial filter. The invention further relates to a method for spatial filter measurement. The spatial filter measuring arrangement according to the invention is further developed in that the spatial filter is designed as a micro-mirror array which has mirror elements (21-21′″) which can be moved about respective angular positions.

Abstract translation: 本发明涉及一种空间滤波器测量装置（1）和包括至少一个传感器（4,5; 41I-41IV; 51）和空间滤波器的空间滤波器测量装置（2），其中电磁辐射，特别是光， 由测量对象（13）发射或反射的信号通过空间滤波器成像到传感器（4,51; 41I-41IV; 51,52）上。 本发明还涉及一种用于空间滤波器测量的方法。 进一步开发了根据本发明的空间滤波器测量装置，其中空间滤波器被设计为具有镜像元件（21-21“）的微镜阵列，其可以在各自的角位置移动。