Invention Grant
- Patent Title: Transmission electron microscope
- Patent Title (中): 透射电子显微镜
-
Application No.: US13757939Application Date: 2013-02-04
-
Publication No.: US09018581B2Publication Date: 2015-04-28
- Inventor: Kazuya Omoto
- Applicant: JEOL Ltd.
- Applicant Address: JP Tokyo
- Assignee: JEOL Ltd.
- Current Assignee: JEOL Ltd.
- Current Assignee Address: JP Tokyo
- Agency: The Webb Law Firm
- Priority: JP2012-25903 20120209
- Main IPC: H01J37/10
- IPC: H01J37/10 ; H01J37/153 ; H01J37/05 ; H01J37/04 ; H01J37/26

Abstract:
A transmission electron microscope (100) includes an electron beam source (2), an illumination lens (10), an objective lens (20), an intermediate lens system (30), a pair of transfer lenses (40) located behind the intermediate lens system (30), and an energy filter (60) for separating the electrons of the beam L transmitted through the specimen (S) according to energy. The transfer lenses (40) transfer the first image to the entrance crossover plane (S1) of the energy filter (60) and to transfer the second image to the entrance image plane (A1) of the filter (60). An image plane (A3) is formed between the first transfer lens (40a) and the second transfer lens (40b).
Public/Granted literature
- US20130206987A1 Transmission Electron Microscope Public/Granted day:2013-08-15
Information query