Invention Grant
- Patent Title: Manufacturing method for semiconductor device having metal gate
- Patent Title (中): 具有金属栅极的半导体器件的制造方法
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Application No.: US14140546Application Date: 2013-12-26
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Publication No.: US09024393B2Publication Date: 2015-05-05
- Inventor: Ssu-I Fu , Wen-Tai Chiang , Ying-Tsung Chen , Shih-Hung Tsai , Chien-Ting Lin , Chi-Mao Hsu , Chin-Fu Lin
- Applicant: United Microelectronics Corp.
- Applicant Address: TW Science-Based Industrial Park, Hsin-Chu
- Assignee: United Microelectronics Corp.
- Current Assignee: United Microelectronics Corp.
- Current Assignee Address: TW Science-Based Industrial Park, Hsin-Chu
- Agent Winston Hsu; Scott Margo
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/28 ; H01L21/8238 ; H01L29/49 ; H01L29/66 ; H01L29/51 ; H01L29/78

Abstract:
A manufacturing method for semiconductor device having metal gate includes providing a substrate having a first semiconductor device and a second semiconductor device formed thereon, the first semiconductor device having a first gate trench and the second semiconductor device having a second gate trench; sequentially forming a high dielectric constant (high-k) gate dielectric layer and a multiple metal layer on the substrate; forming a first work function metal layer in the first gate trench; performing a first pull back step to remove a portion of the first work function metal layer from the first gate trench; forming a second work function metal layer in the first gate trench and the second gate trench; and performing a second pull back step to remove a portion of the second work function metal layer from the first gate trench and the second gate trench.
Public/Granted literature
- US20140106557A1 MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE HAVING METAL GATE Public/Granted day:2014-04-17
Information query
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