Invention Grant
- Patent Title: Terahertz-infrared ellipsometer system, and method of use
- Patent Title (中): 太赫兹红外椭偏仪系统及其使用方法
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Application No.: US13815489Application Date: 2013-03-07
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Publication No.: US09041927B1Publication Date: 2015-05-26
- Inventor: Craig M. Herzinger , Mathias M. Schubert , Tino Hofmann , Martin M. Liphardt , John A. Woollam
- Applicant: Craig M. Herzinger , Mathias M. Schubert , Tino Hofmann , Martin M. Liphardt , John A. Woollam
- Applicant Address: US NE Lincoln US NE Lincoln
- Assignee: J.A. WOOLLAM CO., INC,BOARD OF REGENTS OF THE UNIVERSITY OF NEBRASKA
- Current Assignee: J.A. WOOLLAM CO., INC,BOARD OF REGENTS OF THE UNIVERSITY OF NEBRASKA
- Current Assignee Address: US NE Lincoln US NE Lincoln
- Agent James D. Welch
- Main IPC: G01J4/00
- IPC: G01J4/00 ; G01J4/04 ; G01N21/21 ; G01N21/3581
Abstract:
A dual scanning and FTIR system for application in the Terahertz and broadband blackbody frequency range including sources for providing Thz and broadband blackbody range and electromagnetic radiation, at least one detector of electromagnetic radiation in the THZ and broadband blackbody ranges, and at least one rotating element between the source and detector.
Public/Granted literature
- US20150153230A1 TERAHERTZ-INFRARED ELLIPSOMETER SYSTEM, AND METHOD OF USE Public/Granted day:2015-06-04
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