Invention Grant
US09053912B2 Fine particle measurement system 有权
精细粒子测量系统

Fine particle measurement system
Abstract:
A fine particle measurement system including a primary-side power supply circuit connected to a primary side of an isolation transformer, a control circuit configured to control the primary-side power supply circuit, a first current measurement circuit configured to transmit to the control circuit a first signal indicating a first current that flows from a trapping unit toward a secondary-side reference potential line, and a second current measurement circuit configured to transmit to the control circuit a second signal indicating a second current corresponding to the amount of ions that are not trapped by the trapping unit. The control circuit adjusts the electrical power supplied to the ion generating unit based on the first current and measures the amount of the fine particles in the gas based on the second current. Further, the first current measurement circuit includes an isolation amplifier and amplifies the first signal via the isolation amplifier and transmits the first signal to the control circuit.
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