Invention Grant
- Patent Title: Position sensitive STEM detector
- Patent Title (中): 位置敏感STEM探测器
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Application No.: US14378098Application Date: 2013-02-12
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Publication No.: US09076632B2Publication Date: 2015-07-07
- Inventor: Silviu Reinhorn , Eli Cheifetz , Amit Weingarten
- Applicant: EL-MUT TECHNOLOGIES LTD.
- Applicant Address: IL Rehovot
- Assignee: EL-MUL TECHNOLOGIES LTD.
- Current Assignee: EL-MUL TECHNOLOGIES LTD.
- Current Assignee Address: IL Rehovot
- Agency: AlphaPatent Associates Ltd.
- Agent Daniel J. Swirsky
- International Application: PCT/IL2013/000015 WO 20130212
- International Announcement: WO2013/118111 WO 20130815
- Main IPC: H01J37/26
- IPC: H01J37/26 ; G01T1/20 ; H01J37/28 ; H01J37/244 ; G01N23/04

Abstract:
A STEM system is disclosed wherein an imaging system is used to image the electron scatter pattern plane of the HAADF detector onto a two-dimensional array detector. A data acquisition system stores and processes the data from the two-dimensional array detector. For each illumination pixel of the STEM, one frame of data is generated and stored Each frame includes data of all scattered angles and can be analyzed in real time or in off-line at any time after the scan. A method is disclosed for detecting electrons emitted from a sample by detecting electrons scattered from the sample and generating plurality of corresponding signals, each signal indicative of scattering angle of a scattered electron; generating a plurality of signal groups, each signal group being a collection of signals of a user selected scattering angle.
Public/Granted literature
- US20150034822A1 POSITION SENSITIVE STEM DETECTOR Public/Granted day:2015-02-05
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