公开(公告)号：US09076632B2

公开(公告)日：2015-07-07

申请号：US14378098

申请日：2013-02-12

Applicant: EL-MUT TECHNOLOGIES LTD.

Inventor： Silviu Reinhorn ,  Eli Cheifetz ,  Amit Weingarten

IPC: H01J37/26 ,  G01T1/20 ,  H01J37/28 ,  H01J37/244 ,  G01N23/04

CPC classification number: H01J37/28 ,  G01N23/04 ,  H01J37/244 ,  H01J2237/221 ,  H01J2237/2443 ,  H01J2237/2445 ,  H01J2237/2446 ,  H01J2237/26 ,  H01J2237/2802 ,  H01J2237/2806

Abstract: A STEM system is disclosed wherein an imaging system is used to image the electron scatter pattern plane of the HAADF detector onto a two-dimensional array detector. A data acquisition system stores and processes the data from the two-dimensional array detector. For each illumination pixel of the STEM, one frame of data is generated and stored Each frame includes data of all scattered angles and can be analyzed in real time or in off-line at any time after the scan. A method is disclosed for detecting electrons emitted from a sample by detecting electrons scattered from the sample and generating plurality of corresponding signals, each signal indicative of scattering angle of a scattered electron; generating a plurality of signal groups, each signal group being a collection of signals of a user selected scattering angle.

Abstract translation: 公开了一种STEM系统，其中使用成像系统将HAADF检测器的电子散射图形平面成像到二维阵列检测器上。 数据采集​​系统存储和处理来自二维阵列检测器的数据。 对于STEM的每个照明像素，生成和存储一帧数据每帧包括所有散射角的数据，并且可以在扫描之后的任何时间实时或离线分析。 公开了一种通过检测从样品散射的电子并产生多个对应信号来检测从样品发射的电子的方法，每个信号指示散射电子的散射角; 产生多个信号组，每个信号组是用户选择的散射角的信号的集合。