Invention Grant
US09099278B2 Protective enclosure for an ion gun, device for depositing materials through vacuum evaporation comprising such a protective enclosure and method for depositing materials
有权
用于离子枪的保护罩,用于通过真空蒸发沉积材料的装置,包括这种保护性外壳和用于沉积材料的方法
- Patent Title: Protective enclosure for an ion gun, device for depositing materials through vacuum evaporation comprising such a protective enclosure and method for depositing materials
- Patent Title (中): 用于离子枪的保护罩,用于通过真空蒸发沉积材料的装置,包括这种保护性外壳和用于沉积材料的方法
-
Application No.: US13044007Application Date: 2011-03-09
-
Publication No.: US09099278B2Publication Date: 2015-08-04
- Inventor: Dominique Conte , Jean-Louis Sirjean
- Applicant: Dominique Conte , Jean-Louis Sirjean
- Applicant Address: FR Charenton le Pont
- Assignee: ESSILOR INTERNATIONAL (COMPAGNIE GENERALE D'OPTIQUE)
- Current Assignee: ESSILOR INTERNATIONAL (COMPAGNIE GENERALE D'OPTIQUE)
- Current Assignee Address: FR Charenton le Pont
- Agency: Norton Rose Fulbright US LLP
- Priority: FR1051703 20100309
- Main IPC: C23C14/00
- IPC: C23C14/00 ; H01J37/08 ; H01J37/34 ; H01J37/09 ; H01J37/305

Abstract:
The present invention relates to a protective enclosure for an ion gun and to a device for depositing materials through vacuum evaporation comprising such an enclosure and methods of using each. According to the invention, the protective enclosure comprises a side wall intended to surround said ion gun, and an open upper end, said protective enclosure having a longitudinal axis, a truncated tube shape on its open upper end resulting from an inclined surface relative to said longitudinal axis, and having a lower part and an upper part.
Public/Granted literature
Information query
IPC分类: