Invention Grant
- Patent Title: Terahertz ellipsometer system, and method of use
- Patent Title (中): 太赫兹椭偏仪系统及其使用方法
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Application No.: US14120194Application Date: 2014-05-05
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Publication No.: US09121757B2Publication Date: 2015-09-01
- Inventor: Craig M. Herzinger
- Applicant: J.A. WOOLLAM CO., INC.
- Applicant Address: US NE Lincoln
- Assignee: J.A. WOOLLAM CO., INC.
- Current Assignee: J.A. WOOLLAM CO., INC.
- Current Assignee Address: US NE Lincoln
- Agent James D. Welch
- Main IPC: G01J4/00
- IPC: G01J4/00 ; G01J4/04 ; G01N21/21 ; G01N21/3581 ; G01J5/20 ; G01J5/42 ; G01N21/35
Abstract:
A terahertz ellipsometer, the basic preferred embodiment being a sequential system having a backward wave oscillator (BWO); a first rotatable polarizer that includes a wire grid (WGP1); a rotating polarizer that includes a wire grid (RWGP); a stage (STG) for supporting a sample (S); a rotating retarder (RRET) comprising first (RP), second (RM1), third (RM2) and fourth (RM3) elements; a second rotatable polarizer that includes a wire grid (WGP2); and a Golay cell detector (DET).
Public/Granted literature
- US20140284484A1 Terahertz ellipsometer system, and method of use Public/Granted day:2014-09-25
Information query
