Invention Grant
- Patent Title: Active vibration isolation device based on electromagnetic and aerostatic floatation
- Patent Title (中): 基于电磁和空气静力浮选的主动隔振装置
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Application No.: US14376412Application Date: 2013-02-26
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Publication No.: US09145945B2Publication Date: 2015-09-29
- Inventor: Jiubin Tan , Lei Wang , Rongwei Wen , Bo Zhao , Yuanyuan Yang
- Applicant: HARBIN INSTITUTE OF TECHNOLOGY
- Applicant Address: CN Nangang District, Harbin, Heilongjiang
- Assignee: HARBIN INSTITUTE OF TECHNOLOGY
- Current Assignee: HARBIN INSTITUTE OF TECHNOLOGY
- Current Assignee Address: CN Nangang District, Harbin, Heilongjiang
- Agency: Global IP Services
- Agent Tianhua Gu
- Priority: CN201210201284 20120609
- International Application: PCT/CN2013/071884 WO 20130226
- International Announcement: WO2013/181950 WO 20131212
- Main IPC: F16M13/00
- IPC: F16M13/00 ; F16F15/023 ; F16F15/03

Abstract:
This invention relates to an active vibration isolation installation based on electromagnetic and aerostatic floatation which is essential for the super-precision measurement and manufacture. It mainly consists of an isolation platform, an intermediate sleeve and a base. The isolation platform supports any object(s) placed on the platform and is supported by the intermediate sleeve. And the intermediate sleeve is supported on the base which is fixed on the ground. This invention uses the combination electromagnetic and aerostatic floatation to achieve large bearing capacity while excellent vibration isolation performance is maintained. This invention realizes automatic control of stiffness, using closed-loop speed control methods. It is therefore conclude that this invention can impose an excellent inhibitory action on the vibration originating from surroundings and the platform itself.
Public/Granted literature
- US20140374565A1 ACTIVE VIBRATION ISOLATION DEVICE BASED ON ELECTROMAGNETIC AND AEROSTATIC FLOATATION Public/Granted day:2014-12-25
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