公开(公告)号：US09145945B2

公开(公告)日：2015-09-29

申请号：US14376412

申请日：2013-02-26

Applicant: HARBIN INSTITUTE OF TECHNOLOGY

Inventor： Jiubin Tan ,  Lei Wang ,  Rongwei Wen ,  Bo Zhao ,  Yuanyuan Yang

IPC: F16M13/00 ,  F16F15/023 ,  F16F15/03

CPC classification number: F16F15/023 ,  F16F15/022 ,  F16F15/0232 ,  F16F15/03

Abstract: This invention relates to an active vibration isolation installation based on electromagnetic and aerostatic floatation which is essential for the super-precision measurement and manufacture. It mainly consists of an isolation platform, an intermediate sleeve and a base. The isolation platform supports any object(s) placed on the platform and is supported by the intermediate sleeve. And the intermediate sleeve is supported on the base which is fixed on the ground. This invention uses the combination electromagnetic and aerostatic floatation to achieve large bearing capacity while excellent vibration isolation performance is maintained. This invention realizes automatic control of stiffness, using closed-loop speed control methods. It is therefore conclude that this invention can impose an excellent inhibitory action on the vibration originating from surroundings and the platform itself.

Abstract translation: 本发明涉及一种基于电磁和空气静力浮选的主动隔振装置，这对于超精密测量和制造至关重要。 它主要由隔离平台，中间套筒和底座组成。 隔离平台支撑放置在平台上并由中间套筒支撑的任何物体。 并且中间套筒支撑在固定在地面上的基座上。 本发明使用电磁和空气静电浮选的组合来实现大的承载能力，同时保持优异的隔振性能。 本发明使用闭环速度控制方法实现刚度的自动控制。 因此，可以得出结论，本发明可以对来自周围环境的振动和平台本身施加优异的抑制作用。

公开(公告)号：US20140374565A1

公开(公告)日：2014-12-25

申请号：US14376412

申请日：2013-02-26

Applicant: HARBIN INSTITUTE OF TECHNOLOGY

Inventor： Jiubin Tan ,  Lei Wang ,  Rongwei Wen ,  Bo Zhao ,  Yuanyuan Yang

IPC: F16F15/023 ,  F16F15/03

CPC classification number: F16F15/023 ,  F16F15/022 ,  F16F15/0232 ,  F16F15/03

Abstract: This invention relates to an active vibration isolation installation based on electromagnetic and aerostatic floatation which is essential for the super-precision measurement and manufacture. It mainly consists of an isolation platform, an intermediate sleeve and a base. The isolation platform supports any object(s) placed on the platform and is supported by the intermediate sleeve. And the intermediate sleeve is supported on the base which is fixed on the ground. This invention uses the combination electromagnetic and aerostatic floatation to achieve large bearing capacity while excellent vibration isolation performance is maintained. This invention realizes automatic control of stiffness, using closed-loop speed control methods. It is therefore conclude that this invention can impose an excellent inhibitory action on the vibration originating from surroundings and the platform itself.

Abstract translation: 本发明涉及一种基于电磁和空气静力浮选的主动隔振装置，这对于超精密测量和制造至关重要。 它主要由隔离平台，中间套筒和底座组成。 隔离平台支撑放置在平台上并由中间套筒支撑的任何物体。 并且中间套筒支撑在固定在地面上的基座上。 本发明使用电磁和空气静电浮选的组合来实现大的承载能力，同时保持优异的隔振性能。 本发明使用闭环速度控制方法实现刚度的自动控制。 因此，可以得出结论，本发明可以对来自周围环境的振动和平台本身施加优异的抑制作用。