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US09174235B2 Substrate treating apparatus using horizontal treatment cell arrangements with parallel treatment lines 有权
使用具有平行处理线的水平处理电池装置的基板处理装置

Substrate treating apparatus using horizontal treatment cell arrangements with parallel treatment lines
Abstract:
A substrate treating apparatus includes a treating block including a plurality of cells arranged one over another. Each cell has treating units for treating substrates and a single main transport mechanism disposed in a transporting space for transporting the substrates to the treating units. The treating units include solution treating units and heat-treating units. The solution treating units are arranged at one side of the transporting space, the heat-treating units are arranged at the other side of the transporting space, and the main transport mechanism and the treating units are in substantially the same layout in plan view for the respective cells. The solution treating units are in substantially the same layout in side view for the respective cells, the heat-treating units are in substantially the same layout in side view for the respective cells, and treatments of the substrates carried out in the respective cells are the same.
Abstract(Chinese):

一种基板处理装置，包括处理块，该处理块包括多个彼此排列的单元。 每个单元具有用于处理基板的处理单元和设置在用于将基板输送到处理单元的输送空间中的单个主输送机构。 处理单元包括溶液处理单元和热处理单元。 溶液处理单元布置在传送空间的一侧，热处理单元布置在传送空间的另一侧，主传送机构和处理单元在平面图中基本相同的布局 各自的细胞。 溶液处理单元在各个单元的侧视图中基本相同的布局，热处理单元在各个单元的侧视图中基本相同的布局，并且在各单元中执行的基板的处理是 相同。

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