A method of making an anti-reflective film comprises preparing a liquid composition with specific amounts of tetraethyl orthosilicate, polyethylene glycol, HCl, ethanol and at least one alcohol having a higher boiling point than ethanol and miscibility with both ethanol and water; applying the liquid composition onto a surface of a substrate to form a liquid film; evaporating the ethanol and the at least one alcohol from the liquid film to form a solid film; and heating the solid film to form a silica film.