公开(公告)号：US09242893B2

公开(公告)日：2016-01-26

申请号：US14318050

申请日：2014-06-27

Applicant: AGC FLAT GLASS NORTH AMERICA, INC.

Inventor： Jean-Francois Oudard

IPC: G02B1/11 ,  C03C17/25 ,  G02B1/113 ,  H01L31/0216 ,  C03C23/00 ,  H01L31/18 ,  B05D3/02 ,  B05D7/04

CPC classification number: C03C17/25 ,  B05D3/0254 ,  B05D7/04 ,  B05D2203/35 ,  C03C23/007 ,  C03C23/0085 ,  C03C2217/213 ,  C03C2217/732 ,  C03C2218/112 ,  C03C2218/113 ,  C03C2218/32 ,  G02B1/113 ,  G02B2207/107 ,  H01L31/02168 ,  H01L31/18 ,  Y02E10/50

Abstract: A method of making an anti-reflective film comprises preparing a liquid composition with specific amounts of tetraethyl orthosilicate, polyethylene glycol, HCl, ethanol and at least one alcohol having a higher boiling point than ethanol and miscibility with both ethanol and water; applying the liquid composition onto a surface of a substrate to form a liquid film; evaporating the ethanol and the at least one alcohol from the liquid film to form a solid film; and heating the solid film to form a silica film.

Abstract translation: 制备抗反射膜的方法包括制备具有特定量的原硅酸四乙酯，聚乙二醇，HCl，乙醇和至少一种沸点高于乙醇的醇和与乙醇和水混溶的液体组合物; 将液体组合物施加到基材的表面上以形成液膜; 从液膜中蒸发乙醇和至少一种醇形成固体膜; 并加热固体膜以形成二氧化硅膜。