Invention Grant
- Patent Title: Drawing apparatus, and method of manufacturing article
- Patent Title (中): 绘图装置及制作方法
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Application No.: US14054314Application Date: 2013-10-15
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Publication No.: US09245715B2Publication Date: 2016-01-26
- Inventor: Tomoyuki Morita , Masato Muraki
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2012-228446 20121015
- Main IPC: H01J37/147
- IPC: H01J37/147 ; H01J37/302 ; H01J37/317 ; H01J37/04 ; B82Y10/00 ; B82Y40/00

Abstract:
The present invention provides a drawing apparatus for performing drawing on a substrate with a plurality of charged particle beams, comprising a blanker array including first and second groups, each of which includes at least one blanker, a deflector configured to deflect the plurality of charged particle beams to scan the plurality of charged particle beams on the substrate, and a controller configured to respectively supply first and second control signals to the first and second groups at first and second timings, wherein the first and second groups are respectively arranged at such relative positions that a positional difference between respective drawing regions thereof, due to a difference between the first and second timings, in a scanning direction of the deflector is compensated for.
Public/Granted literature
- US20140106279A1 DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE Public/Granted day:2014-04-17
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