Invention Grant
US09263243B2 Assemblies for ion and electron sources and methods of use 有权
用于离子和电子源的组件和使用方法

Assemblies for ion and electron sources and methods of use
Abstract:
Certain embodiments described herein are directed to devices that can be used to align the components of a source assembly in a source housing. In some examples, a terminal lens configured to couple to the housing through respective alignment features can be used to retain the source components in a source housing to provide a source assembly.
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