Invention Grant
- Patent Title: Method for S/TEM sample analysis
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Application No.: US14546244Application Date: 2014-11-18
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Publication No.: US09275831B2Publication Date: 2016-03-01
- Inventor: Jason Arjavac , Pei Zou , David James Tasker , Maximus Theodorus Otten , Gerhard Daniel
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, PC
- Agent Michael O. Scheinberg; Nathan H. Calvert
- Main IPC: H01J37/28
- IPC: H01J37/28 ; H01J37/305 ; G01N1/06 ; G01N1/08 ; G01N1/28 ; G01N23/04 ; G01N1/32 ; H01J37/26 ; H01J37/06 ; H01J37/18 ; H01J37/20
Abstract:
An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (
Public/Granted literature
- US20150206707A1 Method for S/TEM Sample Analysis Public/Granted day:2015-07-23
Information query
